Automated TEM Sample Extraction for Semiconductor Process Control
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Summary
Problems
Current methods for preparing Transmission Electron Microscope (TEM) samples are labor-intensive, time-consuming, and often unreliable, especially when multiple samples need to be extracted and analyzed from a semiconductor wafer, which hinders their practical use in manufacturing process control.
Innovation solutions
A fully or partially automated process for TEM sample extraction and handling, using an ex-situ sample extraction tool with a mechanical stage, optical microscope, and a beveled probe with vacuum capabilities to accurately and precisely extract and transfer lamellae onto a TEM grid, reducing the need for electrostatic forces and minimizing sample movement issues.
TRIZ Analysis
Specific contradictions:
General conflict description:
Principle concept:
If manual sample extraction and transfer methods are used, then sample preparation can be performed, but the process is labor-intensive and time-consuming
Why choose this principle:
The system enables automated self-service sample extraction and transfer through integrated FIB milling, electrostatic probe manipulation, and automated grid loading. The probe automatically extracts lamellae from the FIB-milled substrate and transfers them to the TEM grid without manual intervention, significantly improving throughput and reducing preparation time.
Principle concept:
If manual sample extraction and transfer methods are used, then sample preparation can be performed, but the process is labor-intensive and time-consuming
Why choose this principle:
The invention combines multiple functions into a single integrated system: FIB sample preparation, electrostatic probe-based extraction, and automated TEM grid loading. This merging of operations into one automated workflow eliminates the need for separate manual steps, thereby increasing productivity and reducing overall preparation time.
Application Domain
Data Source
AI summary:
A fully or partially automated process for TEM sample extraction and handling, using an ex-situ sample extraction tool with a mechanical stage, optical microscope, and a beveled probe with vacuum capabilities to accurately and precisely extract and transfer lamellae onto a TEM grid, reducing the need for electrostatic forces and minimizing sample movement issues.
Abstract
An improved method and apparatus for extracting and handling samples for STEM analysis. Preferred embodiments of the present invention make use of a micromanipulator and a hollow microprobe probe using vacuum pressure to adhere the microprobe tip to the sample. By applying a small vacuum pressure to the lamella through the microprobe tip, the lamella can be held more securely and its placement controlled more accurately than by using electrostatic force alone. By using a probe having a beveled tip and which can also be rotated around its long axis, the extracted sample can be placed down flat on a sample holder. This allows sample placement and orientation to be precisely controlled, thus greatly increasing predictability of analysis and throughput.