Ceramic Heater Electrode Design for Precise Temperature Control
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Summary
Problems
Ceramic heaters with embedded heater electrodes face issues with reverse temperature dependence of resistivity, making temperature control complicated due to uneven distribution of molybdenum carbide, which is exacerbated by the use of molybdenum paste in low-temperature firing processes.
Innovation solutions
Incorporating a titanium component into the molybdenum heater electrode and using a complex oxide of titanium, aluminum, and magnesium (Ti—Al—Mg—O) dispersed in molybdenum, along with an acrylic binder to minimize molybdenum carbide formation and ensure uniform resistivity.
TRIZ Analysis
Specific contradictions:
General conflict description:
Principle concept:
If molybdenum paste is used as heater electrode material, then alternative to WC is achieved, but reverse phenomenon of temperature dependence of resistivity occurs
Why choose this principle:
The patent applies composite materials by combining molybdenum with titanium component to form a composite heater electrode. This composite structure prevents the reverse phenomenon of temperature dependence of resistivity that occurs with pure molybdenum, while maintaining the electrical characteristics suitable for heater electrodes. The titanium component modifies the material properties to eliminate the problematic reverse phenomenon.
Principle concept:
If molybdenum paste is used as heater electrode material, then alternative to WC is achieved, but reverse phenomenon of temperature dependence of resistivity occurs
Why choose this principle:
The patent changes the compositional parameters of the heater electrode by adding a titanium component to molybdenum. This parameter change (composition modification) alters the electrical resistance temperature dependence characteristics, eliminating the reverse phenomenon while maintaining suitable electrical conductivity for heater operation.
Application Domain
Data Source
AI summary:
Incorporating a titanium component into the molybdenum heater electrode and using a complex oxide of titanium, aluminum, and magnesium (Ti—Al—Mg—O) dispersed in molybdenum, along with an acrylic binder to minimize molybdenum carbide formation and ensure uniform resistivity.
Abstract
The electrostatic chuck 10 includes a discoidal alumina ceramic substrate 12 and a heater electrode 14 and an electrostatic electrode 16 embedded in the alumina ceramic substrate 12 . The top surface of the alumina ceramic substrate 12 is a wafer-mounting face 12 a . The heater electrode 14 has a pattern, for example, of a single continuous line so as to realize electric wiring over the entire surface of the alumina ceramic substrate 12 . Upon the application of a voltage, the heater electrode 14 generates heat and heats the wafer W. The heater electrode 14 is made of a complex oxide of titanium, aluminum, and magnesium (Ti—Al—Mg—O) dispersed in molybdenum.