Flexible Substrate Separation: Patent-Based Engineering Solution
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Summary
Problems
The challenge in manufacturing flexible display devices is the inability to effectively separate a flexible substrate from a carrier substrate, which limits the portability and scalability of thin and flexible display devices like OLEDs.
Innovation solutions
An apparatus and method utilizing a stage with inclined vacuum pad portions to form cracks in the flexible substrate, allowing for the separation of the flexible substrate from the carrier substrate through tilting operations, facilitating the detachment process.
TRIZ Analysis
Specific contradictions:
General conflict description:
Principle concept:
If a flexible substrate is used to enable thin and flexible display devices, then portability and flexibility are improved, but separation from the carrier substrate becomes difficult
Why choose this principle:
The vacuum pad portion is divided into multiple independent vacuum pads arranged in an array, allowing selective activation of different regions. This segmentation enables localized separation forces to be applied to different areas of the flexible substrate, facilitating controlled detachment from the carrier substrate while maintaining flexibility.
Principle concept:
If a flexible substrate is used to enable thin and flexible display devices, then portability and flexibility are improved, but separation from the carrier substrate becomes difficult
Why choose this principle:
The vacuum pad portions are configured to be movable relative to each other, enabling dynamic adjustment of separation forces. By selectively moving and activating different vacuum pads, the system can adapt the separation process to handle the flexible substrate's unique properties, overcoming the non-separation issue while preserving flexibility.
Application Domain
Data Source
AI summary:
An apparatus and method utilizing a stage with inclined vacuum pad portions to form cracks in the flexible substrate, allowing for the separation of the flexible substrate from the carrier substrate through tilting operations, facilitating the detachment process.
Abstract
An apparatus for separating a substrate and a method of separating a substrate by using the same are disclosed. In one aspect, the apparatus includes a stage and an adsorber facing the stage and comprising a plurality of vacuum pad portions. An upper surface of the stage includes a first region and a pair of second regions located on opposing sides of the first region, wherein the first region and the second regions are disposed on different planes, and wherein each of the second regions is inclined with respect to the first region.