Fluid Sensor Design for Accurate Low-Flow Measurement
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Summary
Problems
Existing fluid sensors fail to maintain high measurement accuracy across a wide range, especially at flows below 25% of full-scale, and lack reliability in critical fields like aerospace and nuclear industries.
Innovation solutions
A fluid sensor design featuring at least two measuring tubes with proportional diameters, allowing for adjustable flow ratios and optional spare tubes to ensure accuracy and reliability, integrated into a mass flow controller with a flow divider and control circuit for precise flow adjustment.
TRIZ Analysis
Specific contradictions:
General conflict description:
Principle concept:
If a single measuring tube with fixed inside diameter is used, then the device structure is simple, but measurement accuracy cannot be guaranteed across the whole measurement range (especially below 25% of full-scale flow)
Why choose this principle:
The patent divides the measurement system into multiple measuring tubes with different inside diameters (e.g., first measuring tube with diameter D1, second measuring tube with diameter D2 where D1:D2 = 1:2). Each tube is optimized for specific flow ranges, allowing high measurement accuracy across the entire measurement range by selecting the appropriate tube for the current flow condition.
Principle concept:
If a single measuring tube is used, then the device is simple to operate, but reliability is poor due to susceptibility to damage and lack of redundancy
Why choose this principle:
The patent pre-configures multiple measuring tubes with different inside diameters and establishes corresponding switching criteria before operation. The controller automatically selects the appropriate measuring tube based on real-time flow conditions, eliminating the need for manual intervention and maintaining ease of operation while significantly improving reliability through redundancy and damage tolerance.
Application Domain
Data Source
AI summary:
A fluid sensor design featuring at least two measuring tubes with proportional diameters, allowing for adjustable flow ratios and optional spare tubes to ensure accuracy and reliability, integrated into a mass flow controller with a flow divider and control circuit for precise flow adjustment.
Abstract
The present disclosure provides a fluid sensor and a mass flow controller. The fluid sensor comprises at least two measuring tubes whose diameters have a proportional relationship. The fluid sensor provided by the present disclosure can guarantee measurement accuracy in a whole measurement range and also can improve device reliability.