MEMS Design Enhancing Energy Efficiency and Sensitivity
Here’s PatSnap Eureka !
Summary
Problems
Existing MicroElectroMechanical Systems (MEMS) face inefficiencies in energy usage and sensitivity due to the rigidity of the retention layer, which affects the active element's ability to bend effectively in actuator and sensor modes, leading to energy loss and reduced performance.
Innovation solutions
The MEMS design incorporates a core layer with recesses and pillars to locate the neutral axis within the core or retention layer, providing anisotropic rigidity and minimizing stress for bending, while maintaining or increasing the thickness of the active element without compromising energy efficiency or sensitivity.
TRIZ Analysis
Specific contradictions:
General conflict description:
Principle concept:
If the retention layer has greater thickness and rigidity than the active layer to ensure sufficient structural stability, then the structural stability is improved, but the neutral axis is located in the retention layer causing the active layer contraction to also contract the retention layer, resulting in energy loss and reduced efficiency
Why choose this principle:
The retention layer is segmented into a first retention layer and a second retention layer separated by an interface, with the neutral axis positioned at this interface. This segmentation allows the structure to maintain overall stability while enabling the active layer to bend without dragging the entire retention layer, thus reducing energy loss.
Principle concept:
If the retention layer has greater thickness and rigidity than the active layer to ensure sufficient structural stability, then the structural stability is improved, but the neutral axis is located in the retention layer causing the active layer contraction to also contract the retention layer, resulting in energy loss and reduced efficiency
Why choose this principle:
The patent applies different rigidity characteristics to different parts of the retention layer. The first retention layer has different mechanical properties than the second retention layer, creating a gradient structure that optimizes both stability and energy efficiency by allowing controlled deformation at the neutral axis interface.
Application Domain
Data Source
AI summary:
The MEMS design incorporates a core layer with recesses and pillars to locate the neutral axis within the core or retention layer, providing anisotropic rigidity and minimizing stress for bending, while maintaining or increasing the thickness of the active element without compromising energy efficiency or sensitivity.
Abstract
A MicroElectroMechanical System is provided, with an active element configured to carry out an electromechanical function, the active element including, from an upper face to a lower face substantially parallel to the upper face, an active layer, a core layer, and a retention layer, the active layer being configured to, under the effect of a first electric signal, go into a mechanically stressed state, configured to generate a bending of the active element in a direction perpendicular to a front face thereof, and vice versa, the active layer, the core layer, and the retention layer being arranged so that a neutral axis, associated with an elongation of zero in a case of bending of the active element, is located in a volume of one or the other of the core layer and of the retention layer, and the core layer further includes at least 20% recesses in its volume.