Precise Dopant Control in Mixed Layer Deposition
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Summary
Problems
Existing methods for depositing layers in organic electroluminescence and photovoltaic devices struggle to achieve precise and adjustable high concentrations of dopants, with prior art methods resulting in homogeneous but not necessarily optimal composition profiles.
Innovation solutions
The method involves arranging evaporation plumes from multiple sources such that their maxima are separated within the coating area on the substrate, allowing for precise control of the composition by tilting and adjusting the distance of the evaporation sources, enabling a gradient-like distribution of components, particularly increasing dopant concentration through varying the tilting angle and distance.
TRIZ Analysis
Specific contradictions:
General conflict description:
Principle concept:
If evaporation plumes from multiple sources are arranged with separated maxima within the coating area, then the precision of dopant concentration control is improved, but the complexity of the deposition apparatus increases
Why choose this principle:
The patent applies local quality by creating distinct spatial zones within the coating area where different evaporation sources dominate. By arranging evaporation plumes with separated maxima, each region of the substrate receives a controlled mixture ratio of dopant and organic material, enabling precise local composition control without requiring complex global adjustment mechanisms.
Principle concept:
If evaporation plumes from multiple sources are arranged with separated maxima within the coating area, then the precision of dopant concentration control is improved, but the complexity of the deposition apparatus increases
Why choose this principle:
The patent utilizes the spatial dimension by arranging evaporation sources at different positions and orientations to create separated plume maxima. This dimensional arrangement allows independent control of composition profiles across the substrate surface, achieving precise dopant concentration control through geometric configuration rather than complex temporal or compositional adjustments.
Application Domain
Data Source
AI summary:
The method involves arranging evaporation plumes from multiple sources such that their maxima are separated within the coating area on the substrate, allowing for precise control of the composition by tilting and adjusting the distance of the evaporation sources, enabling a gradient-like distribution of components, particularly increasing dopant concentration through varying the tilting angle and distance.
Abstract
The present invention refers to a method as well as an apparatus for depositing a layer at a substrate, the layer containing at least two components co-deposited by at least two evaporation sources, wherein the mixture of the components regarding the content of the components is set by tilting the evaporation sources to predetermined angle and/or by positioning the evaporation sources at a predetermined distance with respect to the substrate and/or wherein evaporation plumes of the evaporation sources are arranged such that the maxima of the evaporation plumes are separated locally with respect to the substrate.