Enhanced Thermal Control for Semiconductor Substrates
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Summary
Problems
In rapid thermal processing of semiconductor substrates, achieving accurate temperature control and improved cooling rates is challenging due to interference from radiation from the heating source, which affects the accuracy of pyrometry measurements and prolongs the cooling process.
Innovation solutions
A filter, such as a reflective or absorptive window, is used to block specific wavelengths of radiation between the heating source and the substrate, preventing unwanted radiation from reaching the substrate during heating and cooling, thereby enhancing temperature control and cooling efficiency.
TRIZ Analysis
Specific contradictions:
General conflict description:
Principle concept:
If radiation from the heating source is allowed to reach the substrate during heating, then heating efficiency is improved, but temperature measurement accuracy deteriorates due to interference with pyrometry
Why choose this principle:
The radiation spectrum is segmented into different wavelength ranges. A filter is introduced to block specific wavelength ranges that interfere with pyrometry measurements while allowing other wavelength ranges to contribute to heating. This segmentation allows simultaneous optimization of heating efficiency and measurement accuracy by treating different spectral components separately.
Principle concept:
If radiation from the heating source is allowed to reach the substrate during heating, then heating efficiency is improved, but temperature measurement accuracy deteriorates due to interference with pyrometry
Why choose this principle:
A filter is introduced as an intermediary component between the heating source and the substrate. This filter selectively transmits certain wavelengths while blocking others, thereby mediating the interaction between radiation and substrate to eliminate measurement interference while preserving heating effectiveness.
Application Domain
Data Source
AI summary:
A filter, such as a reflective or absorptive window, is used to block specific wavelengths of radiation between the heating source and the substrate, preventing unwanted radiation from reaching the substrate during heating and cooling, thereby enhancing temperature control and cooling efficiency.
Abstract
Methods and apparatus for processing substrates and controlling the heating and cooling of substrates are described. A radiation source providing radiation in a first range of wavelengths heats the substrate within a predetermined temperature range, the substrate being absorptive of radiation in a second range of wavelengths within the first range of wavelengths and within the predetermined temperature range. A filter prevents at least a portion of radiation within the second wavelength range from reaching the substrate.