Two-Piece Shutter Disk Design for Substrate Protection
Here’s PatSnap Eureka !
Summary
Problems
Conventional shutter disks in process chambers deform due to thermal mismatch and material deposition, leading to exposure of substrate supports and issues like arcing, sticking, and reduced electrostatic chucking force, with existing solutions like reduced RF powers and cooling gases failing to adequately protect the substrate.
Innovation solutions
A two-piece shutter disk assembly comprising an upper disk member and a lower carrier member, where the lower carrier member supports the upper disk member to create a protective overlap region, managing thermal expansion and deformation, and is designed to minimize exposure of the substrate support during conditioning processes.
TRIZ Analysis
Specific contradictions:
General conflict description:
Principle concept:
If shutter disk thickness and weight are minimized for robot handling, then ease of operation is improved, but the shutter disk deforms more during pasting and burn-in processes
Why choose this principle:
The shutter disk is divided into two separate components: a thin upper shutter disk member for robot handling and a lower carrier member for structural support. This segmentation allows each component to be optimized for its specific function – the upper member remains thin and lightweight while the lower member provides the necessary mechanical strength and thermal stability.
Principle concept:
If shutter disk thickness and weight are minimized for robot handling, then ease of operation is improved, but the shutter disk deforms more during pasting and burn-in processes
Why choose this principle:
The invention uses a composite structure combining two different members made from potentially different materials. The upper shutter disk member can be made from a material optimized for thermal resistance, while the lower carrier member provides mechanical support. This composite approach allows optimization of each component for its specific requirements.
Application Domain
Data Source
AI summary:
A two-piece shutter disk assembly comprising an upper disk member and a lower carrier member, where the lower carrier member supports the upper disk member to create a protective overlap region, managing thermal expansion and deformation, and is designed to minimize exposure of the substrate support during conditioning processes.
Abstract
Shutter disk assemblies for use in process chambers to protect a substrate support disposed below the shutter disk assembly from undesired material deposition are provided herein. In some embodiments, a shutter disk assembly for use in a process chamber to protect a substrate support disposed below the shutter disk assembly may include an upper disk member having a top surface and a bottom surface; and a lower carrier member having at least a portion of the lower carrier member disposed below a portion of the upper disk member to support the upper disk member and to create a protective overlap region that prevents exposure of the substrate support upon deformation of the upper disk member.