Vibration Isolation in Position Measuring Apparatus for Precision Manufacturing
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Summary
Problems
Existing position measuring apparatuses using plate-like scales with grating patterns face challenges in maintaining precision due to vibration-induced deformations, particularly in the plate thickness direction, which can affect the alignment of circuit patterns during exposure processes.
Innovation solutions
A supporting unit with a spring element is introduced between the structure and the scale to reduce vibration transfer in the plate thickness direction, utilizing magnetic repulsion forces and non-contact driving apparatuses to minimize deformation and enhance measurement precision.
TRIZ Analysis
Specific contradictions:
General conflict description:
Principle concept:
If the scale is rigidly mounted on the lens barrel surface plate, then the scale is stable and resistant to displacement, but vibration from the structure is transferred to the scale causing deformation in the plate thickness direction
Why choose this principle:
A supporting apparatus is introduced as an intermediary between the lens barrel surface plate and the scale. This supporting apparatus includes a spring element that selectively filters vibration frequencies, allowing stable support while blocking harmful vibrations in the plate thickness direction from reaching the scale.
Principle concept:
If the scale is rigidly mounted on the lens barrel surface plate, then the scale is stable and resistant to displacement, but vibration from the structure is transferred to the scale causing deformation in the plate thickness direction
Why choose this principle:
The supporting apparatus is designed with a natural frequency lower than the vibration frequency from the lens barrel surface plate. By controlling the natural frequency parameter of the supporting apparatus, it effectively attenuates vibration transmission to the scale while maintaining stable support.
Application Domain
Data Source
AI summary:
A supporting unit with a spring element is introduced between the structure and the scale to reduce vibration transfer in the plate thickness direction, utilizing magnetic repulsion forces and non-contact driving apparatuses to minimize deformation and enhance measurement precision.
Abstract
A position measuring apparatus configured to measure a position of an measured object using a plate-like scale including a grating pattern, includes a supporting unit configured to be arranged between a structure and the scale and to support the scale, in which the supporting unit includes a spring element that reduces vibration transferred from the structure to the scale in a plate thickness direction.