MAY 12, 202673 MINS READ
The classification of manganese high purity metal centers on two primary criteria: overall elemental purity and the density of non-metallic inclusions. According to recent patent disclosures, high purity manganese is characterized by a purity level of 3N (99.9%) or greater, with non-metallic inclusions larger than 0.5 μm present at densities below 50,000 particles per gram 126. This specification addresses a critical challenge in electronic and magnetic material applications, where even trace impurities can significantly degrade device performance through enhanced diffusion, sputtering anomalies, or magnetic interference 11.
Gaseous impurity control represents another essential dimension of purity. For sputtering target applications, the total content of gas components (O, C, N, H, F, S) must be maintained at ≤200 ppm 89. Oxygen content is particularly critical, with advanced processes targeting levels below 30 ppm 3. Sulfur, commonly present in electrolytic manganese at 100–3000 ppm, must be reduced to below 50 ppm for high-performance applications 35. Chlorine, another common contaminant from aqueous electrolysis processes, should be reduced to ≤10 ppm 3.
Metallic impurities pose specific challenges due to their high diffusion coefficients and potential to compromise thin film uniformity during sputtering. Recent advances in purification target Mg content below 0.10 ppm, Co below 0.05 ppm, Fe below 0.10 ppm, and Ni below 0.05 ppm, with total impurity levels maintained at 10 ppm or less 11. These stringent specifications reflect the demands of highly integrated and miniaturized electronic circuits, where even sub-ppm contamination can affect device reliability and performance.
The Large Particle Count (LPC) metric has emerged as a critical quality indicator, particularly for applications requiring uniform thin film deposition. Traditional sublimation purification methods, while effective at reducing gaseous impurities, often fail to adequately address non-metallic inclusions originating from crucible materials or atmospheric contamination during processing 6. Modern production methods therefore integrate multiple purification stages specifically designed to minimize LPC while maintaining high yield and cost-effectiveness.
The acid washing approach represents a cost-effective alternative to traditional sublimation methods for producing manganese high purity metal with reduced non-metallic inclusions. This process begins with commercially available electrolytic manganese (typically 2N-level purity) as the primary raw material 126. The manganese is subjected to acid leaching, commonly using hydrochloric acid, to dissolve surface impurities and partially leach the bulk material 36. The leachate is then filtered through precision filters to remove undissolved matter and non-metallic particles.
Following acid washing, the purified manganese solution undergoes electrolysis under carefully controlled conditions. The electrolytic bath is prepared by adding oxidizers (such as hydrogen peroxide) to the acid-dissolved manganese solution, followed by neutralization with aqueous ammonia and filtration of precipitated impurities 4. Buffer solutions are added to stabilize pH during electrolysis. The electrowinning process is conducted under reduced pressure (typically 500 Torr or less) in an inert atmosphere to minimize oxygen and nitrogen pickup 16.
A critical innovation in this approach involves the use of deoxidizers such as lanthanum (La), calcium (Ca), and magnesium (Mg) during the melting stage to enhance impurity removal 6. After electrolysis, the manganese is subjected to degassing treatment to reduce chlorine content to below 100 ppm 3. The material is then melted under an inert atmosphere (argon or helium) at temperatures between 1240–1400°C to further reduce gaseous impurities and homogenize the composition 57.
This integrated acid washing and electrolytic refinement route achieves high purity manganese with non-metallic inclusion densities below 50,000 particles per gram at yields comparable to conventional methods but with significantly lower capital costs 6. The process is particularly effective at removing surface-bound contaminants and reducing LPC, making it suitable for sputtering target production and other thin film applications.
For applications requiring ultra-low impurity levels, particularly for metallic contaminants such as B, Mg, Al, and Si, a two-stage melting process combining Vacuum Induction Melting (VIM) and skull melting has been developed 57. This approach begins with flaky electrolytic manganese as the starting material, which is placed in a magnesia crucible to minimize contamination from refractory materials.
In the VIM stage, the manganese is melted at temperatures between 1240–1400°C under an inert atmosphere maintained at 500 Torr or less 57. Calcium is added in the range of 0.5–2.0% by weight of manganese to facilitate deoxidation and desulfurization through the formation of stable calcium oxide and calcium sulfide phases, which float to the surface and can be removed as slag 57. The melting is maintained for sufficient time to ensure complete reaction, typically 30–60 minutes, before casting into iron molds to produce primary ingots.
The primary ingots are then transferred to a skull melting furnace for secondary refinement. The skull melting process operates under high vacuum conditions (10⁻⁵ Torr or less for advanced applications, or 200 Torr or less for standard processes) 57. The melting temperature is adjusted to 1200–1450°C and maintained for 10–60 minutes to allow volatile impurities to evaporate 5. The high vacuum environment is particularly effective at removing elements with high vapor pressures, including residual zinc, magnesium, and other low-boiling-point contaminants.
Following skull melting, the ingots may undergo an additional sublimation distillation step for ultimate purity. The metal manganese ingot is placed in an alumina crucible, evacuated to 0.1 Torr using a vacuum pump, and heated to induce sublimation 5. This final step is particularly effective at reducing impurities such as B, Mg, Al, and Si to sub-ppm levels, though it comes at the cost of reduced yield (typically 30–80% depending on process parameters) 11.
Recent advances in sublimation purification have focused on optimizing preheating protocols to enhance the removal of specific impurity elements, particularly Mg, Co, Fe, and Ni, which are problematic in electronic device applications due to their high diffusion coefficients 11. The process begins with a manganese starting material containing greater than 0.10 ppm Mg and greater than 0.05 ppm Co, typically prepared through chelating resin purification and electrolysis of a manganese chloride solution 11.
The sublimation process consists of two distinct stages: preheating and main heating. During preheating, the manganese is heated to temperatures between 220°C and 450°C under a controlled pressure of 1.5–200 Pa for a minimum of 8 hours 11. This extended preheating period allows for the gradual removal of volatile impurities and conditioning of the material surface, reducing the risk of explosive vaporization during the main heating stage.
The main heating stage is conducted at temperatures between 1000°C and 1200°C under high vacuum conditions (1.5–10 Pa) 11. The sublimation rate is carefully controlled to achieve 30–80% material transfer, balancing purity against yield 11. This controlled sublimation approach effectively reduces Mg content to 0.10 ppm or less, Co to 0.05 ppm or less, Fe to 0.10 ppm or less, and Ni to 0.05 ppm or less, with total impurity levels maintained at 10 ppm or less 11.
The sublimed manganese is collected on cooled surfaces within the vacuum chamber, forming high-purity deposits that can be mechanically removed and consolidated. This method is particularly suitable for producing sputtering targets for advanced semiconductor and display applications, where ultra-low impurity levels are essential for achieving uniform thin film deposition and minimizing defect density.
The removal of gaseous impurities (O, C, N, S, H, Cl, F) from manganese high purity metal requires understanding the thermodynamic and kinetic factors governing their behavior during processing. Oxygen, typically present in electrolytic manganese at several thousand ppm due to electrodeposition from aqueous solutions, can be reduced through multiple mechanisms 5. During vacuum melting, oxygen reacts with carbon impurities to form CO and CO₂, which are removed through the vacuum system. The addition of calcium as a deoxidizer further reduces oxygen through the formation of stable CaO, which partitions into the slag phase 57.
Sulfur removal is facilitated by the formation of calcium sulfide (CaS) during the VIM stage when calcium is added as a desulfurizing agent 57. The CaS has low solubility in molten manganese and floats to the surface, where it can be mechanically removed. Vacuum conditions enhance sulfur removal by promoting the vaporization of manganese sulfide species, particularly at temperatures above 1300°C where the vapor pressure of MnS becomes significant.
Chlorine, introduced during electrolysis from chloride-containing electrolytes, is particularly challenging to remove due to its high reactivity and tendency to form stable manganese chloride species. Degassing treatment under inert atmosphere at elevated temperatures (typically 800–1000°C) promotes the decomposition of manganese chlorides and the volatilization of chlorine 3. The use of hydrogen-containing atmospheres can further enhance chlorine removal through the formation of HCl gas, though this must be balanced against the risk of hydrogen pickup.
Carbon impurities, present in electrolytic manganese at several hundred ppm, are removed primarily through oxidation reactions during melting. In the presence of oxygen or oxidizing slag components, carbon forms CO and CO₂, which are removed through the vacuum system 5. The effectiveness of carbon removal is enhanced by maintaining appropriate oxygen partial pressures during the early stages of melting, followed by deoxidation to achieve final low oxygen levels.
Nitrogen pickup during processing is minimized through the use of high-purity inert atmospheres (argon or helium) and high vacuum conditions during melting and sublimation 157. The solubility of nitrogen in molten manganese increases with temperature and nitrogen partial pressure, making vacuum processing essential for achieving nitrogen levels below 50 ppm.
The removal of metallic impurities from manganese high purity metal involves both chemical and physical separation mechanisms. Iron, one of the most common contaminants in manganese ores and intermediate products, can be removed through solvent extraction using di-(2-ethylhexyl)phosphoric acid (D2EHPA) from sulfuric acid leach solutions 12. This selective extraction exploits the difference in complexation behavior between Fe³⁺ and Mn²⁺ ions, allowing iron to be preferentially extracted into the organic phase while manganese remains in the aqueous phase.
Zinc, often present in manganese materials derived from battery recycling or co-processed ores, is removed through a combination of chemical and thermal methods. During acid washing and leaching, zinc dissolves preferentially due to its higher reactivity compared to manganese 10. In subsequent processing, zinc can be separated through solvent extraction using Cyanex 272, which selectively complexes zinc ions over manganese ions 12. During high-temperature processing, zinc's high vapor pressure (boiling point 907°C, compared to manganese's 2061°C) allows for effective removal through vaporization under vacuum conditions 10.
Magnesium, aluminum, and silicon impurities, which are particularly problematic in electronic applications, are addressed through the combined VIM and skull melting approach 57. These elements have higher affinities for oxygen than manganese, and in the presence of calcium deoxidizer, they preferentially form stable oxides (MgO, Al₂O₃, SiO₂) that partition into the slag phase. The skull melting stage under high vacuum further reduces these impurities through selective vaporization, as Mg has a significantly higher vapor pressure than manganese at typical processing temperatures.
Cobalt and nickel, which have similar chemical properties to manganese and are therefore difficult to separate through conventional chemical methods, are effectively removed through the controlled sublimation process with extended preheating 11. The preheating stage at 220–450°C for at least 8 hours allows for the gradual diffusion of these impurities to the material surface, where they can be preferentially oxidized or volatilized during the main heating stage. The careful control of sublimation rate (30–80%) ensures that the bulk of the manganese is transferred while leaving behind a residue enriched in Co and Ni 11.
Non-metallic inclusions represent a critical quality concern for manganese high purity metal, particularly for sputtering target applications where inclusions can cause arcing, particle generation, and non-uniform film deposition. These inclusions typically originate from three sources: residual impurities in the starting material, contamination from refractory materials during melting, and atmospheric contamination during processing 6.
The acid washing approach directly addresses inclusion content by dissolving surface-bound particles and filtering the leachate through precision filters before electrolysis 126. This pre-treatment step is particularly effective at removing oxide and carbide inclusions that are present in the starting electrolytic manganese. The subsequent electrolysis under inert atmosphere minimizes the formation of new inclusions through atmospheric contamination.
The choice of crucible material during melting significantly impacts inclusion content. Magnesia (MgO) crucibles are preferred for VIM processing due to their high refractoriness and relatively low reactivity with molten manganese 57. However, some dissolution of crucible material is inevitable, contributing to Mg and O content in the final product. Alumina (Al₂O₃) crucibles, used in sublimation processes, can contribute Al and O impurities 5. Advanced processes employ skull melting techniques, where the molten metal is contained by a solidified shell of the same material, eliminating crucible contamination entirely 57.
Filtration of the molten metal through ceramic foam filters immediately before casting can further reduce inclusion content. These filters, typically made of alumina or zirconia, physically trap inclusions larger than the filter pore size (typically 10–50 μm) while allowing the molten metal to pass through. The effectiveness of filtration depends on maintaining appropriate metal temperature and flow rate to prevent filter clogging while achieving high inclusion removal efficiency.
The final inclusion density in high purity manganese produced through optimized acid washing and electrolytic refinement routes is typically below 50,000 particles per gram for inclusions larger than 0.5 μm 126. This represents a significant improvement over conventional sublimation methods, which often achieve lower gaseous impurity levels but higher inclusion densities due to contamination from refractory materials and atmospheric exposure during processing.
Accurate characterization of manganese high purity metal requires a combination of analytical techniques capable of detecting impurities at ppm and sub-ppm levels. Inductively Coupled Plasma Mass Spectrometry (ICP-MS) serves as the primary method for quantifying metallic impurities, offering detection limits in the low ppb range for most elements. Sample preparation typically involves acid digestion in high-purity nitric acid or aqua regia, followed by dilution and analysis. For ultra-high purity materials, special attention must be paid to blank contamination and the use of high-purity reagents to ensure accurate quantification at sub-ppm levels.
Gaseous impurity analysis requires specialized techniques. Oxygen and nitrogen content are typically determined using inert gas fusion analysis, where the sample is melted in a graphite crucible under helium flow, and the released gases are quantified by thermal conductivity or infrared detection. Carbon and sulfur are analyzed using combustion methods, where the sample is burned in an oxygen-rich
| Org | Application Scenarios | Product/Project | Technical Outcomes |
|---|---|---|---|
| JX NIPPON MINING & METALS CORPORATION | Sputtering targets for semiconductor manufacturing, thin film deposition in electronic devices, and magnetic material applications requiring uniform film quality | High-Purity Manganese Sputtering Target | Achieves 3N (99.9%) purity with non-metallic inclusions >0.5μm reduced to <50,000 particles/g through acid washing and electrolytic refinement, with total gas content (O,C,N,H,F,S) ≤200ppm |
| JX NIPPON MINING & METALS CORPORATION | Advanced electronic components, high-performance magnetic materials, and precision alloy production requiring minimal gaseous contamination | Ultra-High Purity Manganese Metal | Reduces gaseous impurities to Cl≤10ppm, C≤50ppm, S<50ppm, O<30ppm through degassing treatment and inert atmosphere melting from electrolytic manganese feedstock |
| JX金属株式会社 | High-end electronic device manufacturing, precision magnetic components, and energy storage applications demanding minimal metallic impurities | VIM-Skull Melted High-Purity Manganese | Achieves ultra-low impurity levels (B, Mg, Al, Si) through vacuum induction melting with calcium deoxidation (0.5-2.0% Ca addition) followed by skull melting under 10⁻⁵ Torr vacuum at 1200-1450°C |
| OSAKA TITANIUM TECHNOLOGIES CO. LTD. | High-integration semiconductor sputtering targets, miniaturized electronic circuits, and advanced display manufacturing requiring sub-ppm metallic impurity control | Sublimation-Purified Manganese | Reduces Mg to ≤0.10ppm, Co to ≤0.05ppm, Fe to ≤0.10ppm, Ni to ≤0.05ppm with total impurities ≤10ppm through controlled preheating (220-450°C, 8+ hours) and sublimation (1000-1200°C) at 30-80% yield |
| JFE STEEL CORPORATION | Sustainable manganese metal production for battery materials, steel alloying, and chemical applications utilizing secondary resources with reduced environmental impact | Recycled High-Purity Manganese Metal | Produces high-purity manganese comparable to electrolytic grade from waste dry batteries through water washing, heat treatment (≥600°C), and arc furnace reduction, effectively removing zinc by vaporization and carbon by combustion |