Wafer-handling-baugruppe
AT1934193TUndetermined Publication Date: 2026-07-15ASM IP HLDG BV
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Patent Information
- Application Number
- AT2024177108T
- Authority / Receiving Office
- AT · AT
- Patent Type
- Patents
- Current Assignee / Owner
- Priority Date
- 2023-05-24
- Filing Date
- 2024-05-21
- Publication Date
- 2026-07-15
- Estimated Expiration
- 2044-05-21
Abstract
A wafer handling assembly, a semiconductor processing apparatus comprising the wafer handling assembly and a method of forming a layer on a plurality of wafers is disclosed. Embodiments of the described wafer handling assembly comprise a boat having three boat supports per wafer for supporting the wafer in the boat and an end effector comprising three end effector supports for supporting a wafer on the end effector.
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