Microprocessor-Controlled UV-Ozone Cleaner with Dual Ozone Inputs and Periodic Control

Abstract

This invention relates to a UV-C LED-based ozone cleaning apparatus designed for precise and efficient substrate surface cleaning, with particular applications in research laboratories and the organic electronics industry. The system integrates a high-power UV-C LED light source (270–280 nm) for enhanced efficiency and longevity, paired with an advanced ozone generation mechanism that utilizes either ambient air or high-purity oxygen. A microprocessor-controlled interface manages all operations, ensuring optimal cleaning while preventing overoxidation. The device operates in two distinct modes: UV-O₃ (with oxygen) and UV-Air-O₃ (with air), featuring periodic ozone cycling to regulate concentration and maximize energy efficiency. Key components include a centrally positioned array of UV-C LEDs, an ozone generator, and a microprocessor-controlled timing system, all housed in a safety-first design. The system incorporates interlocks, alarms, and a tray sensor to prevent operation when the substrate chamber is unsecured. Userfriendly features such as a touchscreen interface allow for precise cleaning time adjustments and customizable ozone cycling settings, offering flexibility for various substrate materials. The absence of exhaust ports and reflectors streamlines the design while maintaining cleaning effectiveness. Innovations like dual air / oxygen inputs, controlled ozone generation cycles, and comprehensive safety mechanisms set this invention apart from existing UV-ozone cleaning devices. By addressing challenges such as substrate overoxidation, limited input flexibility, and inefficient control systems, this invention provides a versatile and reliable solution for advanced cleaning needs in academia and industry.

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