Ultrasonic surface treatment process to reduce the roughness of at least one microtechnical part made of polycrystalline material

Abstract

The invention relates to an ultrasonic treatment method for at least one microtechnical part (100) made of polycrystalline material having a hardness greater than 1000 HV. The method comprises a treatment operation in which a sonotrode (200) and the part (100) are immersed in a bath (300) comprising an abrasive suspension in a carrier fluid such that a working face (201) of the sonotrode (200) is arranged opposite a face (101) to be treated of the part (100), at a distance of between 1 mm and 10 mm. The sonotrode (200) is configured to exhibit, during the treatment operation, a volumetric ultrasonic power between 50 W / L and 1000 W / L, an ultrasonic intensity of 5 W / cm², a frequency between 20 and 40 kHz, and an amplitude of 20 to 150 µm. The abrasive suspension comprises abrasive particles with a size between 0.1 µm and 80 µm.