Line width measuring method

Abstract

A line width measuring method capable of securing constant differences between peaks and bottoms of the brightness is proposed. An object to be measured includes a transparent substrate 21, an opaque pattern 22 formed thereon and a semitransparent film 23 formed on both the transparent substrate and the opaque pattern. When a line width of the semitransparent film is measured by using a line width measuring device for measuring a line width thereof by simultaneously illuminating both sides of the object to be measured with a reflected beam and a transmitted beam, illuminated regions 26 and 27 are respectively defined on the transparent substrate and the opaque pattern so that the illuminated regions are individually illuminated and then the line width of the semitransparent film is measured.

Description

technical field [0001] The present invention relates to a line width measurement method in a line width measuring device for measuring the line width of a translucent film by simultaneously illuminating both sides of a measurement sample formed with an opaque pattern on a transparent substrate, with reflected light and transmitted light, And a translucent film is formed across the transparent substrate and the opaque pattern. Background technique [0002] Line width measuring devices that measure the line width of a measurement sample using reflected light and transmitted light are already on the market. [0003] First, brightness waveforms obtained when a measurement sample is illuminated with reflected light and transmitted light will be described with reference to FIG. 3 . [0004] In FIG. 3 , the measurement sample is composed of a metal pattern (or metal film) 32 formed on a glass 31 . In fact, when the reflective lighting and the transmitted light are turned on simul...

AI Technical Summary

Problems solved by technology

The power ratio is determined according to the reflectance and transmittance of the sample to be measured, and is determined by the operator's feeling, so there are individual differences between individuals, and the power ratio may change due to the deterioration of the reflected light source and the transmitted light source. , in this case, as illustrated in Fig. 4, the same luminance waveform cannot be obtained all the time, so it is difficult to maintain the state of the same contrast

[0021] Fig. 6(c) is an example of the obtained luminance waveform 25. In the case of a sample with poor transmittance, the peak value of the luminance waveform obtained by transmitted light decreases, and as a result, the contrast between the contrast and the luminance waveform obtained by reflected light different and worse

[0022] Therefore, the line width data is not uniform according to the sample of the measurement sample, and measurement reproducibility is difficult, and accurate measurement of line width cannot be performed.

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