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Capacitor-style microfluid angular accelerometer

An angular accelerometer and microfluidic technology, applied in the direction of measurement of acceleration, velocity/acceleration/shock measurement, measurement device, etc., can solve the problems of increasing structural complexity and manufacturing cost, and improve the frequency response range and the applicable ambient temperature range. , the effect of popularizing the scope of application and high measurement accuracy

Inactive Publication Date: 2008-07-09
SHANGHAI JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In addition, the discrete capacitor plate leads will increase the complexity of the structure and the production cost

Method used

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  • Capacitor-style microfluid angular accelerometer
  • Capacitor-style microfluid angular accelerometer
  • Capacitor-style microfluid angular accelerometer

Examples

Experimental program
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Embodiment Construction

[0015] Such as figure 1 As shown, the present invention includes: an upper housing 1, a fluid chamber 2, a differential capacitor moving plate 3, a differential capacitor fixed electrode plate 4, and a lower housing 5. The upper shell 1 and the lower shell 5 are fixedly connected together by adhesive material. The fluid chamber 2 is enclosed by the inner ring wall 6, the outer ring wall 7 and the baffle 10, and the differential capacitive moving electrode plate 3 passes The annular wall 7 outside the chamber is connected to the lower casing 5, the differential capacitor fixed electrode plate 4 and the lower casing 5 are fixedly connected together, and the fluid chamber 2 is filled with high-density fluid.

[0016] Such as figure 2 , image 3 As shown, on the lower housing 5 are distributed a differential capacitive moving electrode plate 3, an inner ring wall 6, a ∏-shaped fixed electrode plate 8, an L-shaped fixed electrode plate 9, a baffle 10, a rigid chamber outer wall 11, a...

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PUM

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Abstract

A microfluid angular accelerometer of capacity type consists of top and bottom shell, fluid chamber, active and static counter electrode. It is featured as charging heavy density liquid full in said chamber, generating incline of baffle under inertia force action of sealing liquid when angular accelerometer is existed at vertical direction for driving differential capacity active counter electrode to move by flexible chamber external wall, detecting variation of differential capacity by control circuit then deriving out angular acceleration value inputted from outside .Its preparing process also disclosed.

Description

Technical field [0001] The invention relates to a device in the technical field of microelectromechanical systems, in particular to a capacitive microfluidic angular accelerometer. Background technique [0002] Accelerometers are commonly used to measure the second derivative of displacement with respect to time. Angular accelerometer measures the second derivative of angular displacement with respect to time. It can be used in automotive safety control systems, hard disk anti-shock and vibration and other fields. When the carrier has an angular acceleration input in a certain direction, the angular accelerometer can output an electrical signal (such as a voltage) proportional to the input angular acceleration through the detection circuit. For example, the sensed angular acceleration signal can be used to determine whether the car is about to tip over, so that corresponding measures can be taken in time. Angular accelerometers can also be used to control the read-write head of t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01P15/125
Inventor 吴校生陈文元赵小林张卫平
Owner SHANGHAI JIAOTONG UNIV