Member for internal combustion engine and production method thereof
A technology for internal combustion engines and components, which is applied in the production or manufacture of pistons, components for internal combustion engines, valves, and fuel injection valves, and can solve problems such as nozzle opening blockage and fuel spray control deterioration
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Embodiment 1
[0067] Aluminum alloy AC2A was used as the base material of the piston, the surface of the alloy was mirror finished, and then the coating was deposited under the following conditions.
[0068] ●Preprocessing conditions
[0069] Pretreatment gas: argon, under 100 sccm (sccm=cm 3 / min at 25°C and 1.0×10 5 Pa)
[0070] High Frequency Power: 300W at a frequency of 13.56MHz
[0071] Deposition vacuum: 0.1Torr
[0072] Processing time: 5min
[0073] ●Deposition conditions
[0074] Deposition gas source: methane (CH 4 ) gas, fluorocarbon (C 2 f 6 )gas
[0075] High Frequency Power: 300W at a frequency of 13.56MHz
[0076] Deposition vacuum: 0.1Torr
[0077] Deposition rate: 300A / min
[0078] Deposition time: 17min
[0079]The thickness of the film is 0.5 μm, which is obtained from the electron microscope observation image; and in the region from the surface to the depth of 4 nm, the atomic number ratio of the F content to the C content, F / C, is 0.4, which is obtained fr...
Embodiment 2
[0082] SUS420J is used as a base material for valves and fuel injection valves, then their surfaces are mirror-finished, and then the coating is deposited under the following conditions.
[0083] ●Preprocessing conditions
[0084] Pretreatment gas: argon, under 100 sccm (sccm=cm 3 / min at 25°C and 1.0×10 5 Pa)
[0085] High Frequency Power: 300W at a frequency of 13.56MHz
[0086] Deposition vacuum: 0.1Torr
[0087] Processing time: 5min
[0088] ●Deposition conditions
[0089] Deposition gas source: methane (CH 4 ) gas, fluorocarbon (C 2 f 6 )gas
[0090] High Frequency Power: 300W at a frequency of 13.56MHz
[0091] Deposition vacuum: 0.1Torr
[0092] Deposition rate: 250A / min
[0093] Deposition time: 20min
[0094] The thickness of the coating film was 0.5 μm, which was obtained from electron microscope observation images; and the atomic number ratio of F content to C content, F / C, from the surface to a depth of 4 nm was 0.25, which was obtained from XPS analy...
Embodiment 3
[0096] SUS420J is used as a base material for valves and fuel injection valves, then their surfaces are mirror-finished, and then the coating is deposited under the following conditions.
[0097] ●Preprocessing conditions
[0098] Pretreatment gas: argon, under 100 sccm (sccm=cm 3 / min at 25°C and 1.0×10 5 Pa)
[0099] High Frequency Power: 300W at a frequency of 13.56MHz
[0100] Deposition vacuum: 0.1Torr
[0101] Processing time: 5min
[0102] ●Deposition conditions
[0103] Deposition gas source: methane (CH 4 ) gas, fluorocarbon (C 2 f 6 )gas
[0104] High Frequency Power: 300W at a frequency of 13.56MHz
[0105] Deposition vacuum: 0.1Torr
[0106] Deposition rate: 300A / min
[0107] Deposition time: 17min
[0108] The thickness of the coating film was 0.5 μm, which was obtained from electron microscope observation images; and the atomic number ratio of F content to C content, F / C, from the surface to a depth of 4 nm was 0.4, which was obtained from XPS analys...
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