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Semiconductor device and semiconductor device manufacturing method

A semiconductor and wire bonding device technology, applied in semiconductor/solid-state device manufacturing, semiconductor devices, semiconductor/solid-state device components, etc., can solve problems such as poor yield, position offset, and increased manufacturing process time, and achieve bonding High strength, prevention of wire breakage, and increased bonding strength

Active Publication Date: 2009-07-15
ROHM CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0031] However, in the semiconductor device described in Patent Document 1, after the bump is formed, the small-diameter tube of the wire bonding device moves once from the position above the formed bump to above the electrode of the semiconductor chip to perform the first bonding. , and then return to the top of the bump again to perform the second bonding, so there may be problems that easily cause position shift and poor yield
In addition, there is also a problem that the manufacturing process time increases due to the formation of bumps in different processes.

Method used

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  • Semiconductor device and semiconductor device manufacturing method
  • Semiconductor device and semiconductor device manufacturing method
  • Semiconductor device and semiconductor device manufacturing method

Examples

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no. 1 approach

[0073] figure 1 It is a cross-sectional view schematically showing an example of the semiconductor device according to the first embodiment of the present invention.

[0074] Such as figure 1 As shown, the semiconductor device 30 includes: a semiconductor chip 6 having a plurality of electrodes 5 formed on the surface; an island portion 108 to which the semiconductor chip 6 is bonded; and a plurality of lead terminals arranged at predetermined intervals from the island portion 8 . 13; the first lead 2a electrically connecting the electrode 5 on the semiconductor chip 6 to the island portion 8; the double junction portion 25 formed by ball bonding on the second junction portion 10 (not shown); The portion 25 serves as one end of the second lead 2b; the first lead 2c electrically connects the electrode 5 and the lead terminal 13; and the resin encapsulation portion 12 seals these components.

[0075] According to the semiconductor device 30, since the double bonding portion ...

no. 2 approach

[0098] The semiconductor device according to the second embodiment has substantially the same configuration as that of the semiconductor device according to the first embodiment except that there is no second lead and no second bonding portion of the second lead is formed. The description of its configuration is omitted. Here, steps related to wire bonding will be described. Note that components corresponding to those of the semiconductor device according to the first embodiment are described with the same reference numerals.

[0099] Figure 4 (a)~(d) and Figure 5 (a) to (d) are process diagrams schematically showing a process related to wire bonding, which is a part of the manufacturing process of the semiconductor device according to the second embodiment of the present invention.

[0100] First, if Figure 4 As shown in (a), the lead wire 2 is inserted into the small-diameter tube 1, and the tip of the welding torch 3 is opposed to discharge between the lead wire 2, a...

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Abstract

The present invention aims at providing a semiconductor device capable of reliably preventing a wire bonded to an island from being disconnected due to a thermal shock, a temperature cycle and the like in mounting and capable of preventing remarkable increase in the process time. In the semiconductor device according to the present invention, a semiconductor chip is die-bonded to the surface of an island, one end of a first wire is wire-bonded to an electrode formed on the surface of the semiconductor chip to form a first bonding section and the other end of the first wire is wire-bonded to the island to form a second bonding section, while the semiconductor device is resin-sealed. A double bonding section formed by wire-bonding a second wire is provided on the second bonding section of the first wire wire-bonded onto the island.

Description

technical field [0001] The present invention claims priority based on Japanese Patent Application No. 2005-118625 filed on April 15, 2005 as an earlier application. [0002] The present invention relates to a semiconductor device and a method for manufacturing the semiconductor device. Background technique [0003] Conventionally, in a semiconductor device having a semiconductor chip such as an LSI, there is a method of die bonding a semiconductor chip to an island, and connecting electrodes formed on the upper surface of the semiconductor chip to the island with wires. semiconductor device. use Figure 6 , a process related to wire bonding (wire bonding), which is a part of the manufacturing process of the semiconductor device, will be described. [0004] Figure 6 (a) to (d) are process diagrams schematically showing an example of a conventional manufacturing process of a semiconductor device. [0005] First, if Figure 6 As shown in (a), a lead wire 102 is inserted int...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/60
CPCH01L2224/45H01L2924/19107H01L2224/85986H01L2224/48257H01L2224/45669H01L24/45H01L2224/85181H01L2224/45139H01L2924/01015H01L2224/48997H01L2224/48091H01L2924/01047H01L2924/01046H01L2224/45124H01L2924/01004H01L2924/01006H01L2924/01078H01L2224/85051H01L24/48H01L2224/4911H01L2924/01079H01L2224/45147H01L2224/85205H01L2924/01014H01L2224/48475H01L2224/85951H01L2924/01005H01L24/78H01L2924/01082H01L23/3107H01L2224/45144H01L2924/01013H01L2224/49429H01L2224/85045H01L2924/014H01L2224/85201H01L24/85H01L24/49H01L2924/01029H01L2224/45164H01L2224/48247H01L2224/4848H01L2224/78301H01L2224/48465H01L2224/4554H01L2224/48227H01L23/49517H01L23/49503H01L2924/01033H01L2224/45015H01L2224/85203H01L2924/181H01L2224/78251H01L2924/00014H01L2924/00H01L2224/48455H01L2924/00012H01L2224/85399H01L2224/05599H01L2924/207
Inventor 广本秀树藤井贞雅山口恒守
Owner ROHM CO LTD