Quartz heat sensitive resonance instrument
A resonator and heat-sensitive technology, applied in power oscillators, electrical components, etc., to achieve fast response, good impact resistance, and good linearity
Inactive Publication Date: 2009-10-28
HARBIN ENG UNIV
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Therefore, when the length (degree) / width (degree) ratio is small, such as 5 to 8, what kind of technological innovation should be adopted to improve its frequency / temperature characteristics and reduce the adverse effects on dynamic capacitance? These issues have never been resolved
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[0024] The present invention is described in more detail below in conjunction with accompanying drawing example:
[0025] The composition of the quartz thermal resonator includes a tube shell 1, a quartz crystal plate 2 arranged in the tube shell, the shape of the quartz crystal plate is a rectangular parallelepiped with chamfered angles, and evaporation or sputtering The metal excitation electrode and the receiving electrode 5 are produced respectively by the method, the shape of the electrode 5 is a kitchen knife, the edge 6 of the electrode 5 is corrugated, and the surroundings of the excitation electrode and the receiving electrode on the quartz crystal sheet are respectively evenly distributed with mass dispersion loaded metal Membrane block group 7 has V-shaped incisions 8 cut inward along the width direction of the quartz crystal sheet, and there are hole arrays 9 in the area of the quartz crystal sheet where the excitation electrode and receiving electrode are not arr...
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The invention provides a quartz thermal resonator. It includes a tube shell 1, a quartz wafer 2 arranged in the tube shell, the shape of the quartz wafer is a rectangular parallelepiped with chamfered corners, metal excitation and receiving electrodes 5 are arranged on the two surfaces 4 in the thickness direction, and the shape of the electrode 5 is a kitchen knife. The edge 6 of the electrode 5 is corrugated. There are mass dispersion loaded metal film blocks 7 evenly distributed around the excitation and receiving electrodes on the quartz plate, and there are V-shaped incisions 8 cut inward along the width direction of the quartz plate. , the deep hole array 9 is made on the area where the excitation and receiving electrodes and the mass-loaded metal film block group are not arranged on the quartz wafer, and the electrical signal output by the quartz wafer is drawn out through the pin 10 . The invention has the advantages of high Q value, few parasitic modes, little adverse effect on dynamic capacitance, strong mechanical vibration resistance, good linearity of frequency / temperature characteristics, fast response speed and the like.
Description
(1) Technical field [0001] The invention relates to an electronic sensitive component, in particular to a heat sensitive resonator. (2) Background technology [0002] As we all know, the quartz thermal resonator is the key component that determines the precision, fast response and high stability of the sensor. At present, there are three development directions for domestic and foreign quartz thermal resonators: ①Explore the best thermosensitive cut type, improve sensitivity, linearity and interchangeability; ②Suppress parasitic vibration and improve Q value by exploring the best side ratio of rectangular quartz slices (Quality factor), improve its stability and interchangeability; ③Explore the best surface morphology (curvature and surface roughness, etc.) of quartz wafers, improve Q value, increase sensitivity and improve interchangeability. [0003] In fact, rectangular resonators have been studied for a long time. R.D.Mindlin first published a paper on "Relationship bet...
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IPC IPC(8): H03B5/04
Inventor 林金秋司锡才
Owner HARBIN ENG UNIV