Method for monitoring silicon monocrystal extension layer fault situation using micro-image region iterated logarithm measuring apparatus

Abstract

This invention discloses one method to monitor silicon single crystal extensive layer overlapping in the microscope area, which comprises the following steps: processing large volume of overlap labelon crystal slice surface and comparison slice; by use of overlap device to test the slice exposure definition in microscope area for overlap label to find out overlap cross.

Description

technical field [0001] The invention relates to the field of monitoring the stacking fault (Slip), in particular to a method for monitoring the status of the silicon single crystal epitaxial stacking fault (Slip) by using a lithography area overlay measuring instrument. Background technique [0002] Stacking fault (Slip) refers to a certain crystal crack displacement, which is the growth that deviates from the original crystal lattice direction at certain positions during the growth of single crystal epitaxy (Epitaxial silicon). When the temperature of the wafer rises rapidly, the wafer will bear greater temperature stress. Once the temperature of a certain area on the crystal is significantly hotter or colder than the rest of the area, the crystal can release excess temperature pressure through the fault (Slip). [0003] In a single crystal epitaxial (Epitaxial silicon) sample without stacking faults, the crystal lattice is in a regular arrangement of crystals ( figure 1 ...

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Problems solved by technology

[0005] At present, the frequency of detection of stacking faults (Slip) on the single crystal epitaxial layer is about once a week, and Fourier transform infrared spectroscopy is required for detection. What is more inconvenient is that the measurement results cannot be quantified and can only be judged manually through macro pictures

[0006] To sum up, although the current monitoring results of silicon single crystal epitaxial stacking faults (Slip) can provide us with a macroscopic picture, it also requires the operator to make human judgments, and quantitative information cannot be fed back. The overlay measurement (Overlay) data of the rear imaging layer jumps abnormally, causing irreparable losses

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