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Acoustic wave flow sensor

一种流量传感器、传感器的技术，应用在声波装置领域，能够解决提高制造成本、增加传感器尺寸、老化等问题

Inactive Publication Date: 2008-06-25
HONEYWELL INT INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Such a design increases sensor size and increases manufacturing cost as well as its power utilization
Additionally, the use of heating elements causes aging of any IDT electrodes and associated SAW sensing components

Method used

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  • Acoustic wave flow sensor
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Examples

Experimental program
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Embodiment Construction

[0029] While individual values ​​and configurations discussed in these non-limiting examples can vary, they are provided by way of example only to illustrate at least one embodiment of the invention and are not intended to limit the scope of the invention.

[0030]Figure 1 shows a side view of a flow sensor system 100 including a SAW etched diaphragm 106 not under stress, according to a preferred embodiment. FIG. 2 shows a side view of a flow sensor system 100 depicted in FIG. 1 having a SAW etched diaphragm 106 under stress, according to a preferred embodiment. FIG. 3 shows a top view of a SAW sensor 300 depicted on FIGS. 1-2 having a SAW etched diaphragm 106 according to a preferred embodiment. Note that in FIGS. 1-3, identical or similar parts or elements are generally indicated by identical reference numerals.

[0031] In the configuration of FIG. 1 , the system 100 is depicted with a tube 102 having a central portion 104 in which no fluid is present or flowing within the...

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PUM

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Abstract

An acoustic wave flow sensor is disclosed, which includes a sensor substrate and an acoustic wave diaphragm etched upon the sensor substrate, wherein mechanical stress or strain is concentrated in the acoustic wave diaphragm. One or more interdigital transducers can be configured upon the acoustic wave diaphragm, wherein the sensor substrate, the acoustic wave diaphragm and the interdigital transducer(s) form an acoustic wave flow sensor, such that when the interdigital transducer and the acoustic wave diaphragm are exposed to a fluid in flow, the fluid in flow causes the acoustic wave diaphragm to experience a change in the mechanical stress or strain resulting in a detectable frequency and / or phase change in order to provide an indication of fluid flow.

Description

technical field [0001] Some embodiments of the invention relate generally to flow sensing devices and techniques. Some embodiments of the invention also relate to acoustic wave devices, such as Surface Acoustic Wave (SAW) and Bulk Acoustic Wave (BAW) devices, among others. Background technique [0002] Flow sensors are utilized in a variety of fluid sensing applications that detect quantities of fluids, including gases and liquids. Flow sensors for such fluids that can detect fluid flow or fluid properties can be implemented, for example, as sensors on silicon in microstructured form. For convenience and without limitation, the term "flow sensor" refers not only to the flow of fluids (both gases and liquids), but can also be implemented in the context of thermal sensors. The reader will recognize that such sensors can also be utilized to measure key properties such as temperature, thermal conductivity, specific heat, and others; and that flow can be generated by forced or ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01F1/66
CPCG01F1/662
Inventor J·Z·T·刘R·阿齐兹
Owner HONEYWELL INT INC