6 freedom degrees precision positioning station capable of compensating z-direction position

Abstract

The invention provides a six-freedom precision positioning stage capable of compensating Z-direction position, comprising a XY stage and an exposure stage structurally. The XY stage is a horizontal precision positioning stage for implementing horizontal (X, Y directions) precision positioning by a set of horizontal driver, an accurate and effective transmission device and closed-loop control; theexposure stage is divided from the top down into three layers which are a rotating stage, a leveling and focusing mechanism and a silicon slice thickness compensating mechanism. A silicon anastomosismechanism is disposed between the rotating stage and the silicon slice compensating mechanism. The invented six-freedom precision positioning stage capable of compensating Z-direction position can beused in an occasion with a large stroke, a high speed and a high precision in horizontal direction, and can implement submicron precision adjustment in three freedoms in vertical direction.

Description

technical field [0001] The invention relates to a positioning platform, in particular to a six-degree-of-freedom precision positioning platform including a Z-direction position compensation mechanism. Background technique [0002] High-precision positioning platforms are widely used in semiconductor manufacturing, precision processing and other fields. Taking projection lithography equipment as an example, with the development of technology, the requirements for production efficiency are getting higher and higher, and the size of the substrate is getting larger and the thickness changes. Larger, the stroke of the positioning table carrying the substrate is also getting larger and larger. The "two-degree-of-freedom air-floating precision positioning platform for IC packaging" (public number CN1887686A), published on January 3, 2007, is used for chip packaging or MEMS processing and manufacturing, and can achieve high-speed, high-speed positioning within a stroke range of less...

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Problems solved by technology

"A two-degree-of-freedom air bearing precision positioning platform for IC packaging" (public number CN1887686A), published on January 3, 2007, is used for chip packaging or MEMS processing and manufacturing, and can achieve high-speed, high-speed positioning within a stroke range of less than 100mm. Accurate positioning, but the stroke is small, and the decoupling mechanism is used in the two degrees of freedom, which makes the overall structure complicated

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