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Production method of silicon based liquid crystal panel

A manufacturing method and technology of liquid crystal on silicon, applied in nonlinear optics, instruments, optics, etc., can solve the problems of CCD reading misjudgment, measurement and cutting error, poor cutting accuracy, etc. efficiency, reducing costs, and improving the accuracy of the method

Inactive Publication Date: 2010-06-09
CHUNGHWA PICTURE TUBES LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, there are measurement and cutting errors in the process of generating the alignment edge (for example, the unevenness of the slivers or the wear of the tool), which makes the CCD reading misjudgment, resulting in poor cutting accuracy
Moreover, in addition to the sealant 202 on the silicon substrate 204, a virtual sealant 203 must also be provided to prevent cooling water from penetrating into the panel when the alignment edge is cut, resulting in a waste of sealant

Method used

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  • Production method of silicon based liquid crystal panel
  • Production method of silicon based liquid crystal panel
  • Production method of silicon based liquid crystal panel

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Embodiment Construction

[0036] These drawings in the embodiments of the present invention are simplified schematic diagrams. However, these icons only show components related to the present invention, and the components shown are not the actual implementation. The number and shape of the components in the actual implementation are a selective design, and the layout of the components Possibly more complicated.

[0037] see Figure 4 , is a process flow of a method for manufacturing a liquid crystal on silicon panel according to a preferred embodiment of the present invention. and also see Figure 5A to Figure 5E , is a schematic cross-sectional view of the manufacturing method of the liquid crystal on silicon panel in this embodiment.

[0038] First carry out step S401, provide a silicon substrate 505 that has completed the chip integrated circuit method (referring to Figure 5A ), and cut the silicon substrate 505 to form a plurality of silicon chips 506 (see Figure 5B ). In this embodiment, the...

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Abstract

The invention relates to a manufacturing method used for a silicon-based liquid crystal panel, including the following steps: a glass baseplate provided with a plurality of sealants and a silicon chipprovided with a plurality of circuits are provided; the silicon chip and the glass baseplate are combined; the glass baseplate is cut to get a plurality of panel units; and a liquid crystal is injected into the panel units to form the silicon-based liquid crystal panel. With the manufacturing method, the manufacturing accuracy and the defect-free rate of the silicon-based liquid crystal panel canbe enhanced.

Description

technical field [0001] The invention relates to a method for manufacturing a liquid crystal on silicon panel (LCoS panel), in particular to a method for manufacturing a liquid crystal on silicon panel suitable for microdisplays. Background technique [0002] Liquid Crystal on Silicon Panel (LCoS panel for short) is a key component of a reflective microdisplay. Its structure is as follows Figure 7 As shown, it mainly includes a silicon chip 701 that has been cut and shaped by the chip integrated circuit method as the lower substrate, a glass substrate 702 with a transparent electrode layer 705 as the upper substrate, and a liquid crystal 703 sandwiched between the two substrates. Moreover, the dislocation portion 704 of the silicon chip 701 that does not overlap with the transparent conductive glass 702 is provided with a pad or a conductive bump (not shown in the figure) for connecting other electronic components. [0003] For a flow chart of an existing LCD-on-Si panel man...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02F1/1362G02F1/1339
Inventor 刘光华黄莉贞罗宇城莫启能李怀安
Owner CHUNGHWA PICTURE TUBES LTD