Adhesive chuck and substrate bonding apparatus
A sticky chuck and bonding equipment technology, applied in adhesives, nonlinear optics, chemical instruments and methods, etc., can solve the problems of expensive LCD manufacturing and unreliable operation
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0010] A liquid crystal display (LCD) can be formed by bonding a TFT substrate and a CF substrate together. Liquid crystal material is then injected between the substrates. This bonding process is one of the most important processes for determining the quality of an LCD, and is usually performed by equipment with a vacuum chamber.
[0011] One type of bonding equipment includes electrostatic chucks (ESC) arranged opposite each other in a chamber for holding respective substrates. The device operates by bringing electrostatic chucks closer together while precisely maintaining the parallelism of the chucks. The bonding process is performed with the chuck in these positions.
[0012] The electrostatic chuck used to support the substrate was fabricated to include a metal pattern on a polyimide film. The use of such chucks increases costs. Also, the polyimide film coated on the surface of each chuck may be damaged by particles generated during the substrate attaching process. ...
PUM
Login to View More Abstract
Description
Claims
Application Information
Login to View More 