Photosensitive-resin layered product
A technology of photosensitive resin layer and photosensitive resin, which is applied in the fields of optics, optical filters, optical mechanical equipment, etc., can solve the problems of undisclosed sensitivity, light-shielding fine line adhesion, line width stability, etc., and achieve excellent productivity , the effect of high sensitivity
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[0146] The present invention will be described below based on examples.
Synthetic example 1
[0148]First, according to the method described in JP-A-2001-354735, compound 1 represented by the above formula (I) was synthesized.
[0149] That is, in a 500ml four-necked flask, add 235g bisphenol fluorene type epoxy resin (epoxy equivalent 235), 110mg tetramethylammonium chloride, 100mg2,6-di-tert-butyl-4-methylphenol and 72.0g acrylic acid. While blowing air thereinto at a rate of 25 ml / min, it was heated to 90 to 100° C. for dissolution. Next, the temperature was gradually raised while the solution was kept cloudy, and it was heated to 120° C. to completely dissolve it. At this time, the solution gradually became transparent and viscous, and stirring was continued as it was. Meanwhile, heating and stirring were continued until the measured acid value was less than 1.0 mgKOH / g. It takes 12 hours for the acid value to reach the target value. Then, it cooled to room temperature, and the bisphenol fluorene type epoxy acrylate represented by following formula (V) of the c...
Embodiment 1~9
[0156]
[0157] The components of the photosensitive resin composition were mixed in the ratio shown in Table 1 to obtain a photosensitive resin composition solution using methyl ethyl ketone as a solvent and having a solid content of 10% by mass. In addition, in Table 1, the component which comprises the photosensitive resin composition represented by abbreviation (A-1-F-1) is as follows.
[0158] A-1: PGMEA solution of Compound 1 synthesized in Synthesis Example 1 (solid content concentration: 40% by mass)
[0159] A-2: methyl ethyl ketone solution of benzyl methacrylate / methacrylic acid copolymer (mass ratio: 85 / 15, weight average molecular weight: 30000, solid content concentration: 40% by mass)
[0160] A-3: Methyl ethyl ketone solution of a copolymer of styrene / methyl methacrylate / methacrylic acid (mass ratio: 25 / 50 / 25, weight average molecular weight: 55,000, solid content concentration: 40% by mass).
[0161] A-4: A methyl ethyl ketone solution of a copolymer of sty...
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