Automatic multiple-focus focusing device and method thereof

Abstract

The invention provides an automatic multi-focus focusing device capable of precision focusing in a large scale flat panel display system using a detector and a method thereof. The focusing device comprises a plurality of CCD cameras for shooting images for focusing use; a host camera which has position information corresponding to the CCD cameras and automatically controls the position and the focus height of a focusing camera based on action change and procedure change; a camera position control part which causes the CCD cameras to move based on the camera position information provided by the host camera; an image obtaining part which obtains shot focusing images; an image recognition part which recognizes the focusing images extracted from the image obtaining part to obtain the focusingposition information; a motor control part which generates motor control signals based on the focusing position information; a precision motor which responds to the control signals and causes the CCDcameras to selectively move up and down to realize the precision focusing; a worktable control part which generates worktable control signals based on the recognized focusing position information; and an ultraprecision worktable which responds to the worktable control signals and causes the CCD cameras to selectively move left and right to complete the precision focusing.

Description

technical field [0001] The present invention relates to an automatic multi-focus align technology, in particular to an automatic multi-focus align technology that can accomplish precise focus alignment in a large flat panel display (FPD: Flat Panel Display) system using a probe. Multi-focus focusing device and method thereof. Background technique [0002] Generally, when a probe is used to measure a liquid crystal substrate, it is necessary to correctly align the position of the liquid crystal substrate so that the probes of the probe come into contact with the electrodes of the liquid crystal substrate correctly. [0003] Conventionally, in a focusing system of a multi-focus system, multi-focus alignment is performed by using a WD (Working Distance: working distance) conversion device and a CCD camera that change the focus position by changing the optical path. [0004] That is, changing the focal position by optically differenting the optical path (PASS) means that the WD...

AI Technical Summary

Problems solved by technology

[0005] Therefore, when actually performing multi-focus focusing using an existing optical system, since the WD is determined by the optical system, there is no flexibility, and it is necessary to use multiple systems in terms of characteristics, and there is a large gap due to the flatness error of the instrument between the lenses. It is difficult to make the focus position exactly the same, and there is a disadvantage that the general telecentric lens cannot be used and only 100% custom-made (Order Made) design products must be used

[0006] In addition, due to the increase in the size of flat panel displays in recent years, it is required to install a precise focusing system in the system using the detector. From the perspective of problems in the inspection system caused by the increase in size, it is difficult to replace the detector due to size and model changes. Module (Probe Block), the number of detection modules due to the large size increases rapidly, and the replacement parts of the equipment become heavy due to the increase in size, so it cannot be replaced according to the size, and it is difficult to use the multi-focus using the existing optical system Focusing system to cope with inspection system problems caused by the enlargement of such flat panel displays

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