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Double-arm wafer transmission manipulator
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Al technical title is built by PatSnap Al team. It summarizes the technical point description of the patent document.
A technology of manipulators and wafers, applied in the directions of manipulators, conveyor objects, claw arms, etc., can solve the problems of inconvenient disassembly, assembly and maintenance in the vertical direction, low reliability of line and gas pipe connections, and short service life, and achieves a higher level of crystallinity. The efficiency of circular transmission operation, convenient disassembly and maintenance, and the effect of improving service life
Inactive Publication Date: 2010-06-02
HARBIN INST OF TECH
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[0003] The purpose of the present invention is to solve the problems of the existing wafer transfer manipulators, such as low reliability, short service life, and limited travel in the vertical direction, which cannot meet the needs of large expansion ratio movement in the vertical direction and disassembly and assembly. The problem of extremely inconvenient maintenance, and then provide a double-arm wafer transfer manipulator with a large lift-to-telescopic ratio
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specific Embodiment approach 1
[0007] Specific implementation mode one: combine figure 1 , figure 2 , Figure 4 ~ Figure 8Describe this embodiment, which includes a base 1, a main screw drive assembly 2, an auxiliary screw drive assembly 3, three auxiliary spline guide rail assemblies 4, a middle flange 5, and three main spline guide rails Assembly 6, Z-axis sliding bracket 7, Z-axis driving motor 35, support sleeve assembly 8, T-axis lower flange 9, T-axis transmission assembly 10, T-axis driving motor 11, T-axis upper flange 12. R axis lower flange 13, R axis right arm drive assembly 14, R axis right arm drive motor 15, R axis left arm drive assembly 16, R axis left arm drive motor 17, R axis upper flange 18. R axis left arm assembly 19, R axis right arm assembly 20, wiring module assembly 21, Z axis driving pulley 23, Z axis driving pulley 25, Z axis auxiliary driven pulley 27, The Z-axis synchronous transmission belt 28 and the Z-axis drive motor 35, the wiring module assembly 21 is composed of the...
specific Embodiment approach 2
[0008] Specific implementation mode two: combination image 3 Describe this embodiment, the manipulator of this embodiment is also increased with a primary cover 31, a secondary cover 32 and a tertiary cover 33, the primary cover 31 is arranged on the outside of the middle flange 5, the lower end of the primary cover 31 is fixed Installed on the base 1, the secondary cover 32 is arranged on the outside of the middle flange 5 and the flange 12 on the T-axis, and the upper end of the secondary cover 32 is fixed on the flange 12 on the T-axis. The tertiary cover 33 is arranged on the outside of the flange 18 on the R axis and the flange 12 on the T axis, the upper end of the tertiary cover 33 is fixed on the flange 18 on the R axis, and the secondary cover 32 is set On the outside of the primary cover 31 , the tertiary cover 33 is sleeved on the outside of the secondary cover 32 . Set in this way to supplement the effect. Other compositions and connections are the same as in th...
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Abstract
The invention relates to a double-arm wafer transmission mechanical hand with large lifting expansion ratio, which relates to a wafer transmission mechanical hand, and solves the problems that the prior wafer transmission mechanical hand has low reliability of connection of lines and air pipes, short service life, and limit of stroke in the vertical direction, can not meet the requirement of motion of large expansion ratio in the vertical direction, and is not convenient to detach and maintain. The upper end of an assistant screw rod shaft of an assistant screw rod driving assembly passes through a middle flange and maintains a suspended state, and the upper end of a main screw rod shaft of a main screw rod driving assembly passes through the middle flange, a Z-axis sliding support, a T-axis lower flange, a T-axis upper flange and an R-axis lower flange and maintains a suspended state; the lower end of a spline shaft of a main spline guide rail assembly is fixedly connected with the middle flange; and a linear module assembly is arranged between the T-axis upper flange and the R-axis lower flange. The double-arm wafer transmission mechanical hand has the advantages of high reliability of connection of the lines and the air pipes and long service life, and achieves larger stroke in the vertical direction and extremely convenient as well as maintenance.
Description
technical field [0001] The invention relates to a wafer transfer manipulator. Background technique [0002] At present, the wafer transfer manipulator widely used in the field of integrated circuit (IC) manufacturing equipment (see Figure 7 and Figure 8 ) has the following problems: 1. The traditional single-arm wafer transfer manipulator can only increase its motion speed in order to improve the operation efficiency, but reduces the reliability and service life of the manipulator; 2. In order to meet the working requirements of the wafer transfer system, the manipulator The drop height of the main body must be lower than the lowest working point of wafer transfer. When the lowest working point is low, the maximum stroke capacity of the traditional wafer transfer manipulator in the Z-axis direction is limited, which cannot meet the requirements of large expansion ratio movement in the vertical direction. Requirements; 3. The R-axis line and air pipe of the traditional waf...
Claims
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Application Information
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