Coating material and preparation method thereof
A film and substrate technology, which is applied in the field of coating materials and their preparation, can solve the problems of poor corrosion resistance and wear resistance of the film and the bonding force between the film and the substrate is not good enough, and achieve the effect of good bonding force.
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preparation example Construction
[0013] The preparation method of the coating material provided by the present invention comprises, under the condition of magnetron sputtering, applying power on the magnetron target to sputter and deposit the target material on the magnetron target on the substrate, forming a thin film on the surface of the substrate , wherein the method for forming a thin film on the surface of a substrate includes forming a plurality of metal layers and a plurality of metal nitride layers, adjacent metal layers are separated by a metal nitride layer, wherein in the plurality of metal layers One layer is in contact with the substrate surface, and one of the plurality of metal nitride layers is the outermost layer.
[0014] The above coating material is prepared by magnetron sputtering ion plating equipment, which includes a vacuum chamber, a heating device, a workpiece frame and a magnetron target, and the base material is placed on the workpiece frame.
[0015] The target contains a target ...
Embodiment 1
[0029] This embodiment is used to illustrate the coating material provided by the present invention and its preparation method.
[0030] Adopt magnetron sputtering ion plating equipment (magnetron sputtering ion coating machine, Beijing Beiyi Innovation Vacuum Technology Co., Ltd. manufacture, model is JP-700), this magnetron sputtering ion plating equipment includes vacuum chamber, heating device, The workpiece holder, the magnetron target and the bias device, the heating device, the workpiece holder and the magnetron target are located in the vacuum chamber. The magnetron target is a pair target structure, including a pair of titanium targets. The distance between the two targets of a pair of titanium targets is 18 cm, and the two targets are connected to the positive and negative poles of a power supply with a frequency of 40 kHz. The NdFeB permanent magnet base material (35UH model) is fixed on the workpiece frame, and the NdFeB permanent magnet base material is located b...
Embodiment 2
[0047] This embodiment is used to illustrate the coating material provided by the present invention and its preparation method.
[0048] Prepare the coating material according to the same method as in Example 1, the difference is that the time for forming a metal layer, a metal nitride layer, a metal layer and a metal nitride layer from the surface of the permanent magnet substrate from the inside to the outside is respectively 7 minutes, 20 minutes, 10 minutes and 5 minutes, the thicknesses of the formed film layers are 1 micron, 1 micron, 0.2 micron and 3 microns respectively. Denoted as coating material A2.
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Abstract
Description
Claims
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