Work transfer system

Abstract

Provided is a work transfer system which prevents the entire system from becoming large even when many cassettes are to be processed. The work transfer system is provided with a plurality of cassettes for storing works (31-34), a work processing apparatus (20) arranged at a position facing the cassettes; and a multiple joint robot (1). The cassettes are arranged to be parallel to each other to be parallel to the movement locus of the arm joint section (J1), and a base (2) of a link mechanism (3) and an arm joint section (6) are at positions closer to either one side of the work processing apparatus (20) or the cassettes, from the position at the middle of the work processing apparatus (20) and the cassettes, and a link joint section (J2) is bent and protruded on the side opposite to such side when the link mechanism (3) is driven.

Description

technical field [0001] The present invention relates to a workpiece conveying system having an articulated robot used when loading / unloading workpieces with respect to a cassette. Background technique [0002] When loading / unloading workpieces such as semiconductor wafers from a cassette, an articulated robot is used in which a plurality of arms are rotatably connected to each other, and the movement such as expansion and contraction is performed by transmitting a rotational force from a rotational drive source. In addition, a plurality of boxes for accommodating workpieces, a workpiece processing device for performing predetermined processing on workpieces, and this articulated robot constitute a workpiece conveying system. Combine below Figure 5 A conventional workpiece conveyance system will be described in detail (for example, refer to Patent Document 1). [0003] Such as Figure 5 As shown, the conventional workpiece transfer system includes an articulated robot 100 ,...

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Problems solved by technology

[0009] However, when the lengths of all or some of the parts in the arm part 102, the arm side link part 103 and the base side link part 104 are increased, although in Figure 5 It can reach farther in the X direction (can deal with 4FOUP), but in Figure 5 In the Y direction, the interference area of ​​the robot expands, resulting in an increase in the overall size of the articulated robot 100, which in turn leads to an increase in the overall size of the workpiece conveying system (enlargement of the robot installation space)

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