Miniature spectrometer based on MEMS micro lens array

Abstract

The invention provides a miniature spectrometer based on MEMS micro lens array, which comprises three parts: light splitting and imaging, MEMS scanning micro lens array, and spectral signal acquiring and processing; and the light splitting and imaging part comprises a slit and flat field concave grating, the MEMS scanning micro lens array part comprises a micro lens array device and a micro lens control circuit module, and the spectral signal acquiring and processing part consists of a monotube detector and a spectral signal acquiring and processing circuit. The light sent out from the slit passes through the flat field concave grating to be split and imaged on the MEMS micro lens array, and then is reflected onto the monotube detector positioned in a public light scanning space of a micro lens by the scanning of the MEMS micro lens array. The miniature spectrometer adopts small-area micro lens array for scanning spectrum, the driving voltage of the micro lens is low, and the angle detection device is not needed, thus simplifying the system structure, reducing the system volume, improving the precision, leading to more stable performance, and being capable of being used for on-line detection of portable instruments.

Description

technical field [0001] The invention belongs to the technical field of analytical instruments, in particular to a microscopic wide-spectrum high-resolution spectral analysis instrument based on MEMS micromirrors and concave gratings. Background technique [0002] The technology of qualitative and quantitative analysis of substances by using the emission spectrum, absorption spectrum or scattering spectrum characteristics of substances is called spectral analysis technology. Spectral analysis technology is widely used in industry, agriculture, chemical industry, medicine and other fields. Existing spectral spectroscopic techniques are divided into grating scanning, interference modulation spectroscopic, optical filter, acousto-optic tuning, etc., each with its own characteristics. [0003] The grating scanning spectroscopic system uses a grating as a spectroscopic element and decomposes the incident polychromatic light into monochromatic light with a narrow spectral width by...

AI Technical Summary

Problems solved by technology

F.Zimmer et al. in Germany proposed a kind of infrared spectrometer using MOEMS technology to make a spectral range of 900-2000nm. This spectrometer is based on scanning micromirror technology, and a single micromirror is used to scan the spectrum. Because the mirror area (the area reaches the order of millimeters) ) and a large mirror rotation angle, using electrostatic drive technology, so the problem of the spectrometer based on this micromirror is that the driving voltage of the micromirror is too high (up to hundreds of volts), and it cannot completely overcome the resolution reduction caused by the translation of the mirror during the rotation process. problems, and the external angle detection device leads to a relatively large volume of the spectrometer, which limits the practical application of the instrument

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