Flotox-type eeprom
A floating gate and source technology, applied in static memory, instruments, electrical components, etc., can solve the problem of inability to reduce the unit area
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[0057] Embodiments of the present invention will be described in detail below with reference to the drawings.
[0058] figure 1 It is a figure explaining the structure of the FLOTOX type EEPROM of the W cell system concerning one embodiment of this invention, (A) is a schematic top view, (B) is a cross-sectional view along b-b in (A), (C) It is a sectional view along c-c in (A).
[0059] refer to figure 1 (A) to (C), in the surface layer region of the p-type silicon substrate 21, a field (field) oxide film (LOCOS oxide film) 22 formed by the LOCOS method is formed, and the p-type silicon substrate 21 separated between elements The surface area of the EEPROM forms the cell structure of the EEPROM.
[0060] The cell structure includes a cell transistor 23 and a selection transistor 24 . In the unit transistor 23, there are provided: a pair of two floating gates 25a and 25b; a control gate 26 shared by the two floating gates 25a and 25b; and a source 27 shared by the two ...
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