Compound semiconductor element, packaging structure of optoelectronic element and manufacturing method of optoelectronic element
A packaging structure, semiconductor technology, applied in the structural details of semiconductor lasers, semiconductor/solid-state device manufacturing, semiconductor/solid-state device components and other directions, can solve problems such as poor heat dissipation
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[0090] Figure 2(a)~2(e) It is a schematic diagram of the steps of the manufacturing method of the compound semiconductor element packaging structure of the present invention. As shown in FIG. 2( a ), the temporary substrate 21 has a first surface 211 and a second surface 212 , in which the first surface 211 is an upper surface, and the second surface 212 is a lower surface. Temporary substrate 21 can be made of metal material, ceramic material or polymer material, and printing (printing), screen printing (screening), electroform (electroform), electroless plating (electroless plating) are arranged on its first surface 211. electroplating) or sputtering (sputter) to form a patterned conductive film layer 22 . The conductive film layer 22 can be silver, nickel, copper, tin, aluminum or an alloy of the aforementioned metal materials, or indium tin oxide (ITO), indium zinc oxide (IZO), indium gallium oxide (IGO) and indium tungsten oxide (IWO) and other transparent conductive m...
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