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Method and system for measuring environmental parameter

A technology of environmental parameters and measurement methods, applied in the field of measurement, can solve problems such as reduced measurement efficiency, frequent measurement times, and incorrect information input, and achieve the effect of improving measurement efficiency

Inactive Publication Date: 2010-03-10
SEMICON MFG INT (SHANGHAI) CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, since there are many specified locations for measuring temperature and humidity, for example, there are 134, and the number of measurements is frequent, such as every day, so on the one hand, the work of the surveyors is extremely heavy and the measurement time is very long. On the other hand, there may be Risks such as temperature and humidity information collection errors, recording errors, information input errors and update errors, both of which reduce measurement efficiency

Method used

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  • Method and system for measuring environmental parameter
  • Method and system for measuring environmental parameter

Examples

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example 1

[0024] Example 1: Send the first identification signal, then receive the feedback signal returned by the identification device according to the first identification signal, and then identify the identification device according to the feedback signal. In this identification method, the identification device returns a feedback signal only after receiving the first identification signal, which saves resources consumed by sending signals.

example 2

[0025] Example 2, the receiving identification device sends a second identification signal, and the identification device is identified according to the second identification signal. In this example, the identification device can send out the second identification signal for identification without receiving the first identification signal. In this identification method, the identification device can be identified only by receiving the second identification signal, so the operation is simple and easy to implement.

[0026] There may be various forms of the above-mentioned signals, such as optical signals, electrical signals, magnetic signals or corresponding mixed signals.

[0027] In addition, regardless of whether the identification device is identified, there are many ways to obtain location information from the identification device. Here are a few examples:

[0028] Example 1, the identification device directly sends location information without external request, so it on...

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Abstract

The invention provides a method and a system for measuring an environmental parameter so as to improve the measurement efficiency. The method comprises the following steps of: acquiring position information of a position of which the environmental parameter needs measuring; acquiring an environmental parameter value corresponding to the position; and storing a corresponding relation of the position information and the environmental parameter value information, the position information, and the environmental parameter value information.

Description

technical field [0001] The invention relates to the field of measurement, in particular to a method and system for measuring environmental parameters. Background technique [0002] In the process of integrated circuit manufacturing, because environmental factors such as temperature and humidity in the production area seriously affect the performance of integrated circuits, integrated circuit manufacturing factories need to regularly measure environmental parameters such as temperature and humidity in the production area to closely monitor the environmental factors in the production area , keeping it within the range required for production. [0003] Taking the measurement of temperature and humidity in the production area as an example, the existing measurement method is as follows: the monitoring personnel manually collect the temperature and humidity at the specified positions in the production area every day, and then record the measured temperature and humidity correspon...

Claims

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Application Information

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IPC IPC(8): G01D21/02
Inventor 王勇张诚吴建桦侯大维杨洪春吕秋玲
Owner SEMICON MFG INT (SHANGHAI) CORP
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