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Tetraethyl orthosilicate (TEOS) refill system and purifying method thereof
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A technology of tetraethylhydroxysilicon and reperfusion, applied in special distribution devices and other directions, can solve the problems of inability to purify, inability to pump TEOS solution 3, cost waste, etc., and achieve the effect of cost saving
Inactive Publication Date: 2013-04-17
SEMICON MFG INT (SHANGHAI) CORP
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[0008] But this scheme has following two problems because the residual TEOS solution 3 in the solution tank 4 cannot be sucked into the purification bottle 8:
[0009] One is that the purification effect of TEOS solution tank 2 cannot meet the requirements, and the TEOS solution still needs to be replaced by replacing the TEOS solution tank 2, which brings great cost waste; the other is that it cannot be purified figure 1 The system structure shown in the lower part shows that this purification solution cannot purify the entire TEOS refill system
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Embodiment approach 1
[0029] Embodiment 1. Regardless of whether the purification device can discharge the purified gas that enters itself, steps 20 and 30 can be implemented in the following manner:
[0030] Step a1, passing the purge gas from the second subsystem;
[0031] Step a2, controlling the purge gas to flow through the second subsystem, the first conduit and the As50 subsystem;
[0032] Step a3, discharge the used purge gas from the As50 subsystem.
[0033] Combine below figure 2 The system structure shown illustrates the implementation process of step 10 and steps a1-a3 in this embodiment:
[0034] Open MV7, MV8, AV12 and AV1, close AV3, AV8 and AV11, then suck the TEOS solution in the solution tank 2 and the TEOS solution 3 in the solution tank 4 into the purification bottle 8;
[0035] Open MV3, AV6, AV7, AV8, AV12, AV3 and AV4; pass the purified gas nitrogen from the left end of MV3, then the nitrogen will pass through the second subsystem, the first conduit 5 and the As50 subsyst...
Embodiment approach 2
[0036] Embodiment 2. If the purification device can discharge the gas entering itself, steps 20 and 30 can be implemented in the following manner:
[0037] Step b1, passing the purge gas from the As50 subsystem;
[0038] Step b2, controlling the purification gas to flow into the purification device after flowing through the As50 subsystem, the first conduit and the second conduit;
[0039] Step b3, passing the purge gas from the second subsystem;
[0040] Step b4, controlling the purification gas to flow into the purification device after flowing through the second subsystem and the second conduit; and
[0041] Step b5, discharging the purified gas from the purification device.
[0042] The above steps can be executed sequentially, or in a selective combination, for example, b1-b2 and b3-b4 are executed in parallel, and then b5 is executed; and b1, b2, b5, b3, b4, and b5 are executed in sequence.
[0043] If it is executed in the order of b1, b2, b5, b3, b4 and b5, then for ...
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Abstract
The invention provides a tetraethyl orthosilicate (TEOS) refill system and a purifying method thereof to improve the purifying effect and realize the cost saving when a solution in the system is replaced and the integral purification of the system. The system comprises an As50 subsystem and a second subsystem, wherein the As50 subsystem comprises a first storage device for storing a TEOS solution and a first outer port which is communicated to the As50 subsystem; the second subsystem comprises a second storage device for storing the TEOS solution and a second outer port which is communicated to the second subsystem, and the first outer port is connected with the second outer port by a first guide pipe. The system also comprises a purifying device and a second guide pipe, wherein both ends of the second guide pipe are respectively connected with the purifying device and the second outer port; and the purifying device can store a residual solution which is purified by the TEOS refill system.
Description
technical field [0001] The invention relates to the field of semiconductors, in particular to a tetraethyloxysilane (TEOS) refill (refill) system and a purification method thereof. Background technique [0002] figure 1 It is a structural schematic diagram of the existing TEOS refill system, which includes: a solution tank 2 for storing TEOS solution 1; a solution tank 4 for storing TEOS solution 3; and a conduit for connecting the upper port 6 of the valve V7 and the right port 7 of the valve MV7 ( tube) 5. [0003] The TEOS refill system needs to be purified in many cases. For example, when replacing the TEOS solution in the TEOS refill system, the solution tank needs to be purified first, and the purification effect is high, and then a new solution is introduced. If the purification effect does not meet the requirements, It is necessary to replace the above solution by replacing the solution tank, which will bring great cost; for example, in order to remove the impurity...
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