Double light source sinusoidal phase-modulation displacement measurement interferometer
A technology of phase modulation and displacement measurement, which is applied in the direction of measuring devices, instruments, optical devices, etc., and can solve problems such as light intensity modulation of the light source is not considered
Inactive Publication Date: 2011-07-13
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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However, in the measurement process, the influence of light intensity modulation of the light source is not considered, and the measurement accuracy of this interferometer is only 10nm
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[0049] The present invention will be further described below in conjunction with examples and accompanying drawings, but the protection scope of the present invention should not be limited thereby.
[0050] The structural diagram of the dual-wavelength sinusoidal phase modulation displacement measurement interferometer of the present invention is as follows figure 1 shown. It can be seen from the figure that the dual-wavelength sinusoidal phase modulation displacement measurement interferometer of the present invention includes a first light source 1 driven by a first drive power supply 2 with a first temperature controller 3, a first light source 1 driven by a second drive power supply 12 with a first The second light source 10 , the first fiber coupler 4 , the second fiber coupler 6 , the isolator 5 , the collimator 8 , the photodetector 7 and the signal processor 13 of the second temperature controller 11 . The first drive power supply 2 provides DC drive current and sinus...
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The invention provides a double light source sinusoidal phase-modulation displacement measurement interferometer, which is suitable for measuring a static displacement. The interferometer comprises a light source, an optical fiber coupler, an isolator, a collimator, a photoelectric detector and a signal processor, wherein the light source is provided with driving power supplies and a temperature controller, and has different wavelengths; a trigger controller with the same initial phase is connected between the two driving power supplies; the photoelectric detector converts a received interference signal into an electric signal and then inputs the electric signal to the signal processor; other two input ports of the signal processor are respectively connected with the two driving power supplies; and a data processed by the signal processor is displayed on a digital display. Compared with the prior art, the interferometer of the invention has the advantages of having simple structure and no optical element, theoretically eliminating the error of a measured result caused by ignoring light intensity modulation of the light source through reasonable selection of depth of sinusoidal phase modulation, and promoting the measuring precision.
Description
technical field [0001] The invention relates to a displacement measurement interferometer, in particular to a displacement measurement interferometer with sinusoidal phase modulation of a dual light source. Background technique [0002] The rapid development of information technology and micro-electro-mechanical system (MEMS) technology has put forward higher and higher requirements for displacement detection technology. Interferometry technology has been widely studied because of its advantages of high precision, high resolution, and non-contact. The sinusoidal phase modulation interferometry technology is an international cutting-edge interferometry technology, which has the advantages of high precision, convenient modulation, and simple structure. It has attracted the attention of researchers in recent years and has been greatly developed in the field of displacement measurement. [0003] Sinusoidal phase-modulated interferometers for displacement measurements are nanome...
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IPC IPC(8): G01B9/02
Inventor 王渤帆李中梁王向朝
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI