Two degrees of freedom precision positioning table

Abstract

The invention discloses a two-degree-of-freedom precision positioning workbench, which includes a base, a moving platform, a rigid support connected to the bottom of the base, and four flexible branch chains connected between the moving platform and the base, each flexible branch chain It includes a moving block and three sets of flexible leaf spring structures, each flexible leaf spring structure is composed of two inline flexible leaf springs, wherein the first and second sets of flexible leaf spring structures are respectively located on the left and right sides of the moving block On both sides; the lower ends of the two inline flexible leaf springs of the third group of flexible leaf spring structures are connected to the upper side wall of the moving block, and the upper end is connected to the side wall of the moving platform, and the four piezoelectric ceramic drivers are placed horizontally, The ball joint of each driver is supported on the side wall of the lower end of the moving block, and the conductive sheets of the two position sensors are respectively connected to the upper plane of the rigid support and the lower plane of the moving platform. This positioning workbench can be used as an auxiliary positioning platform for the positioning system of nanoimprint lithography to realize micro-feeding and precise positioning.

Description

technical field [0001] The invention belongs to a micro-operating system, in particular to a two-degree-of-freedom flexible parallel precision positioning workbench that can be applied to an imprint photolithography system. Background technique [0002] Nano-devices include nano-electronic devices and nano-optoelectronic devices, which can be widely used in electronics, optics, micro-mechanical devices, new computers, etc. It is the most dynamic research field in the field of new materials and new devices. , intelligence, high integration and other mainstream development directions. Due to the potential huge market and national defense value of nano-devices, the methods, approaches and processes of its design and manufacture have become the research and investment hotspots of many scientists, governments and large enterprises. At present, the design and manufacture of nano-devices is in a period of rapid development, and there are various methods, and patterning technology ...

AI Technical Summary

Problems solved by technology

Among these existing technologies, although the self-adaptive adjustment precision positioning system is simple in structure, compact in structure and low in cost, its positioning accuracy, especially the adjustment accuracy of parallelism is low, which limits the improvement of processing accuracy and quality

Although the parallelism between the imprint template and the substrate can be improved to a certain extent through active leveling and manual adjustment mechanisms, it cannot compensate for the parallelism error between the template and the substrate due to uneven imprint force during the imprinting process

The airbag cylinder type imprinting system overcomes the disadvantages that the silicone is easily stretched and deformed during the imprinting process, the imprinting force is unevenly distributed, and the template is easy to break. However, the design and use of the vacuum chamber is expensive and the imprinting time is too long.

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