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Evaporation device

An evaporation and evaporation boat technology, applied in the field of thin film evaporation devices, can solve problems such as damage to evaporation boats

Inactive Publication Date: 2012-07-04
DONGGUAN ANWELL DIGITAL MASCH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, there is also the risk of damaging the boat during the tedious replacement process

Method used

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  • Evaporation device
  • Evaporation device
  • Evaporation device

Examples

Experimental program
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Embodiment Construction

[0016] The present invention will be further described below in conjunction with preferred embodiments and accompanying drawings, but the embodiments of the present invention are not limited thereto.

[0017] Please refer to Figure 1-3 , a preferred embodiment of the evaporation device 1 of the present invention includes an evaporation boat 10 and two support platforms 20 . The middle part of the evaporation boat 10 is provided with an evaporation tank 11 for containing materials to be evaporated, and the two ends 13 of the evaporation boat 10 are respectively connected with two support platforms 20 .

[0018] Specifically, such as Figure 1-3 As shown, the support platform 20 includes a support seat 21 , a pressing member 22 and an electrode block 23 . Wherein, the end 13 of the evaporation boat 10 is fixed on the supporting base 21 , the pressing member 22 presses against the supporting base 21 from the end 13 of the evaporation boat 10 , and the supporting base 21 is fix...

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PUM

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Abstract

The invention discloses an evaporation device, on which a pressing member is abutted on an end of an evaporation boat and is detachably connected with a support base; wherein a support surface of the support longitudinally extends and forms two protection plates, a support area is formed between the two protection plate, the end of the evaporation boat is loaded in a support area, when the pressing member is matched with the evaporation boat, the pressing member is housed in the support area; the protection plates and the pressing member are all provided with through holes along the same straight line, one hinged shaft runs through the through holes pivotally so that the pressing member is pivoted with the support seat; the pressing member includes a collision portion and a fastening portion, the collision portion is abutted on the end of the evaporation boat, the fastening portion is separated from the end of the evaporation boat, when the evaporation boat is detached, the pressing member rotates toward the fastening portion around the hinged shaft. The inventive evaporation device has a simple structure, convenient and fast replacement, and good electric connection ability, thereby having high operating efficiency, good stability and long service life.

Description

technical field [0001] The present invention relates to an evaporation device, more particularly to an evaporation device for preparing thin films of organic electroluminescent devices. Background technique [0002] Organic electroluminescent devices are widely used in the industrial field of organic semiconductors, and among them, evaporation is an important process in the process of preparing organic thin films. At present, the most common and widely used evaporation technology is resistive heating. [0003] This resistance heating evaporation device generally includes an evaporation boat, a support platform connected to the two ends of the evaporation boat respectively, and the support platform includes a support seat supporting the evaporation boat and an electrode block carrying the support seat and supplying current thereto. The working principle of this kind of evaporation device is: the current and voltage are transmitted from the electrode block to the support base...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/24H01L51/56
Inventor 杨明生刘惠森范继良叶宗锋王曼媛王勇
Owner DONGGUAN ANWELL DIGITAL MASCH CO LTD