Variable-area capacitive structure capable of adjusting elasticity coefficient of micro mechanical device

Abstract

The invention discloses a variable-area capacitive structure capable of adjusting the elasticity coefficient of a micro mechanical device. In each unit capacitor, the positive surface of a moveable electrode is parallel to that of a fixed electrode. The variable-area capacitive structure is characterized in that: the positive surface of the moveable electrode is rectangular, and the positive surface of the fixed electrode is triangular or zigzag, or the positive surface of the moveable electrode is triangular or zigzag, and the positive surface of the fixed electrode is rectangular; and the triangular positive surface is only overlapped with a long edge of the rectangular positive surface. The variable-area capacitive structure overcomes the defect that the elasticity coefficient in the micro mechanical device with the conventional variable-area capacitive structure cannot be adjusted, can adjust the total elasticity coefficient of the micro mechanical device in a corresponding direction by adjusting the voltage difference between the unit fixed electrode and the unit moveable electrode, and improves the design flexibility of a micro mechanical sensor.

Description

technical field [0001] The invention relates to a variable-area capacitor structure, in particular to a variable-area capacitor structure used for a micro-mechanical gyroscope and a micro-mechanical accelerometer, and belongs to the field of micro-mechanical sensors. Background technique [0002] In the field of micro-mechanical sensors, such as micro-machined gyroscopes and micro-machined accelerometers, micro-machined gyroscopes are sensors used to measure angular velocity and angular displacement, and micro-machined accelerometers are sensors used to measure the acceleration of objects, both of which can be equivalent to In the spring-mass system, the elastic coefficient of the spring is a key physical quantity in the device, and it has a direct relationship with the resonant frequency and sensitivity of the device. [0003] After decades of research, micromechanical sensors have developed rapidly. In terms of detection types, there are mainly piezoresistive, capacitive, ...

AI Technical Summary

Problems solved by technology

There are two types of capacitive micro-mechanical sensors: variable-pitch capacitor structure and variable-area capacitor structure. Since the variable-pitch capacitor structure is used to adjust the elastic coefficient of the device, it has been widely used in the field of micro-mechanical sensors, making the variable-pitch type The structure has become the mainstream in the design, and the variable-area capacitor structure has not been able to adjust the elastic coefficient of the device.

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