Silicon microphone and manufacturing method thereof
A technology of silicon microphones and manufacturing methods, applied in the field of microphones, can solve the problems of diameter limitation, inability to guarantee the size and uniformity of silicon substrates, etc., and achieve the effect of improving consistency
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[0027] The present invention will be further described below with reference to the accompanying drawings and embodiments.
[0028] like figure 2 As shown, the silicon microphone 1 of the present invention includes a substrate 10, an insulating layer 11 disposed on the surface of the substrate 10, a diaphragm 12 covering the insulating layer 11, and a back plate 13 opposite to the diaphragm 12 and separated by a certain distance. Wherein, the cross section of the diaphragm 12 is a bridge-shaped structure.
[0029] The diaphragm 12 includes a bridge bottom portion 120 connected to the insulating layer 11 and a bridge portion 121 extending from the bridge bottom portion 120 and protruding toward the back plate 13 . Wherein, a plurality of leakage holes 122 are provided at the periphery of the bridge portion 121 .
[0030] The base 10 is provided with a cavity 100 , and the diameter of the bridge portion 121 is larger than the diameter of the cavity on the base 10 to avoid stru...
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