Silicon microphone and manufacturing method thereof

A technology of silicon microphones and manufacturing methods, applied in the field of microphones, can solve the problems of diameter limitation, inability to guarantee the size and uniformity of silicon substrates, etc., and achieve the effect of improving consistency

Inactive Publication Date: 2010-09-15
AAC ACOUSTIC TECH (SHENZHEN) CO LTD +1
View PDF3 Cites 22 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since the diaphragm is directly covered on the insulating layer, the diameter of the back cavity determines the diameter of the effective vibration area of ​​the diaphragm, which limits the diameter of the effective vibration area of ​​the diaphragm; and the etched silicon substrate cannot be

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Silicon microphone and manufacturing method thereof
  • Silicon microphone and manufacturing method thereof
  • Silicon microphone and manufacturing method thereof

Examples

Experimental program
Comparison scheme
Effect test

Example Embodiment

[0027] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0028] like figure 2 As shown, the silicon microphone 1 of the present invention includes a substrate 10, an insulating layer 11 disposed on the surface of the substrate 10, a diaphragm 12 covering the insulating layer 11, and a back plate 13 opposite to the diaphragm 12 and separated by a certain distance. Wherein, the cross section of the diaphragm 12 is a bridge-shaped structure.

[0029] The diaphragm 12 includes a bridge bottom portion 120 connected to the insulating layer 11 and a bridge portion 121 extending from the bridge bottom portion 120 and protruding toward the back plate 13 . Wherein, a plurality of leakage holes 122 are provided at the periphery of the bridge portion 121 .

[0030] The base 10 is provided with a cavity 100 , and the diameter of the bridge portion 121 is larger than the diameter of the cavity on the base 10 to avoid stru...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention provides a silicon microphone and a manufacturing method thereof, the silicon microphone comprises a substrate, an insulation layer positioned on the substrate, a vibrating diaphragm connected with the insulation layer and a back plate arranged at a certain distance to the vibrating diaphragm, wherein a diaphragm definition layer for supporting the vibrating diaphragm and leading the vibrating diaphragm to be in the shape of a bridge is arranged between the insulation layer and the vibrating diaphragm. The consistency of the overall performance of the product is high, and the silicon microphone can be extensively used in most of electronic products.

Description

【Technical field】 [0001] The invention relates to a microphone, in particular to a silicon microphone applicable to most electronic products. 【Background technique】 [0002] With the development of wireless communication, there are more and more mobile phone users around the world. The requirements of users for mobile phones are not only satisfied with calls, but also to be able to provide high-quality call effects. Especially the current development of mobile multimedia technology, the mobile phone Call quality is more important. The microphone of a mobile phone is used as a voice pick-up device for the mobile phone, and its design directly affects the call quality. [0003] Micro-Electro-Mechanical-System Microphone (Micro-Electro-Mechanical-System Microphone), also known as silicon microphone, is currently widely used and has better performance. Its packaging volume is smaller than that of traditional electret microphones, and its applications are becoming wider and wide...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): H04R19/04H04R31/00
Inventor 颜毅林杨斌张睿葛舟孟珍奎王建民
Owner AAC ACOUSTIC TECH (SHENZHEN) CO LTD
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products