Pressure sensor and method of manufacturing the same
A technology of pressure-sensitive sensors and substrates, used in instruments, measuring devices, measuring forces, etc.
Active Publication Date: 2013-02-06
株式会社守参铭板
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Problems solved by technology
[0006] Therefore, when a relatively soft substrate is used as the first substrate and the second substrate, the resistance value changes greatly even under a small load, so The sensor has high sensitivity, but under a relatively small load, the electrode layer and the entire area of the resistance layer are in contact, so there is a problem that the detection range of the load is narrow
[0007] On the other hand, when relatively hard substrates are used as the first and second substrates, the first and second substrates do not occur under small loads. Deformation of the substrate, so there is a problem that small loads cannot be detected
Method used
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Embodiment 1
[0073] As the first substrate, a glass epoxy resin having a thickness of 125 μm was used, and a pair of electrodes (comb-shaped electrodes) made of copper were formed on the surface thereof by etching. The thickness of this electrode was set to 38 μm. As the second substrate, a polyethylene terephthalate resin sheet having a thickness of 125 μm was used, and the concavo-convex layer 6 containing silica particles was formed on the surface of the second substrate. The concavo-convex layer 6 was formed of a polyester-based resin containing 10% by weight of silica having a particle size of 50 μm, and had a thickness of 20 μm.
[0074] Then, the resistance layer 7 is formed on the surface of the uneven layer 6 . The resistance layer 7 is made of a phenolic resin containing 5 wt % of silicone resin and 5 wt % of carbon powder. The thickness of the resistance layer 7 was formed to be 10 μm.
[0075] The change of the resistance value with respect to the load change was measured ab...
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Abstract
The present invention provides a pressure sensor and a method of manufacturing the same, which can change resistance to load smoothly in a relatively small load range and detect the pressure to the extent of relatively large load range. An uneven layer 6 is formed of a resin containing non-conductive particles 6a and having insulation properties, on a surface of the second substrate 3, and a resistor layer 7 containing at least carbon powder and having a certain film thickness is formed on a surface of the uneven layer 6. A sum of a film thickness of the uneven layer 6 between the non-conductive particles 6a and a film thickness of the resistor layer 7 is smaller than a particle diameter of non-conductive particles 6a included in the uneven layer, and at least a resistor layer 7 is formed on the non-conductive particles 6a and between the non-conductive particles 6a.
Description
technical field [0001] The present invention relates to a pressure sensitive sensor that detects a change in load based on a change in resistance value and a manufacturing method thereof. Background technique [0002] A typical pressure sensitive sensor 20 such as Figure 6 and even Figure 8 As shown, it includes: a first substrate 22, a pair of electrode layers 21A, 21B opposite to each other are formed on its surface; And the resistance layer 23 which short-circuits between a pair of electrode layer 21A, 21B. [0003] In addition, the pressure sensitive sensor 20 is configured to increase the contact area between the pair of electrode layers 21 and the resistance layer 23 in proportion to an increase in the load P applied to at least one of the first substrate 22 and the second substrate 24 . In addition, the resistance layer 23 of the pressure-sensitive sensor 20 has a generally circular shape, and is formed by applying a conductive resin paste to the surface of the se...
Claims
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IPC IPC(8): G01L1/20
Inventor 森征二
Owner 株式会社守参铭板