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Spray coating system and method

A sprayer and coating technology, which is applied in the field of spraying systems, can solve the problems of poor output and efficiency of spraying systems, residues, etc.

Active Publication Date: 2011-05-18
VISERA TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In the traditional spraying system, due to the contamination of the coating material and / or the residue of the cleaning solvent, the substrate must be further cleaned by manual procedures, resulting in poor yield and efficiency of the traditional spraying system

Method used

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  • Spray coating system and method

Examples

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Embodiment Construction

[0016] figure 1 An embodiment of the spraying system of the present invention is shown. It should be noted that, in order to clearly describe the features of the present invention, the accompanying drawings of the present invention are only simple drawings of the embodiments of the present invention. During actual application, those skilled in the art can add or modify the spraying system according to different requirements Structure.

[0017] figure 1 A spraying system 100 is shown, which generally includes a rotating support member 1 for rotating and supporting a substrate W, and the substrate W is substantially maintained in a horizontal state. The rotation support member 1 is rotated by a rotation shaft 1a, and the rotation shaft 1a is connected to a motor 1b, and the substrate W is supported by a support portion 1c. It should be noted that usually the rotation speed of the rotating support member 1 is very low, and the generated centrifugal force is not enough to remov...

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PUM

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Abstract

A spray coating system and method are provided. The spray coating system includes a spin support for supporting and spinning the substrate; a sprayer for applying a material to an upper surface of the substrate; a cup surrounding a lateral and lower region of the spin support, wherein an opening is located in an upper central region of the cup; an air supply mechanism for supplying air flows to a back surface of the substrate to prevent the material from adhering thereto, and an exhaust zone disposed below a slanted surface of the cup for exhausting the air flow and material.

Description

technical field [0001] The present invention relates to a spray coating system, and more particularly to a spray coating system having a jet of air that prevents contamination of a substrate. Background technique [0002] In the process of semiconductor products, such as semiconductor wafers, semiconductor substrates, flat panel displays, optical discs and other similar objects, at least one coating process is usually required to form a uniform thin film on the surface of the device. For example, the fabrication of integrated circuits involves forming a uniform photoresist layer on a silicon wafer or substrate. Conventional coating techniques include spraying a photoresist material onto a rotating wafer, which generates centrifugal force to disperse the photoresist on the wafer. [0003] The traditional spraying system includes a suction type rotary support member for supporting and rotating the substrate, and the substrate support member is kept substantially horizontal, a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B05C11/06B05C11/10B05B13/02H01L21/00
CPCH01L21/6715
Inventor 薛家皓赵元俊邓国星陈朝祯
Owner VISERA TECH CO LTD