Switch array based on MEMS (Micro-Electro-Mechanical Systems) switch
A switch array and switch technology, which is applied in electric selector switches, relays, electrostatic relays/electro-adhesion relays, etc., can solve the problems of complex wiring of switch arrays and large volume of switch arrays, and achieve simple wiring, fewer lead wires, and output connections. line simple effect
Inactive Publication Date: 2011-05-25
CHINA AEROSPACE TIMES ELECTRONICS
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Problems solved by technology
[0004] The technical solution problem of the present invention is: to overcome the shortcomings of the traditional switch array with large volume and complex wiring of the switch array based on MEMS technology, in order to realize the miniaturization and high-density integration of the switch array, the present invention proposes a MEMS switch-based switch array
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[0024] Below in conjunction with accompanying drawing and specific embodiment the present invention is described in further detail:
[0025] like figure 1 As shown, it is a structural schematic diagram of an electromagnetic MEMS switch. The electromagnetic MEMS switch includes a planar coil, a support beam, a movable electrode, a fixed electrode, and a base. Its working principle is: the active electrode is a pair of opposite electrodes. When the MEMS switch is not working, there is no contact between the two, and the switch is in the off state. If the planar coil has a current passing through it, the magnetic field generated will cause the active electrode to generate a certain torque. , under the action of this torque, the movable electrode will contact with the two fixed electrodes on the substrate simultaneously, so that the two opposite electrodes are connected, and the switch is also in the closed state. Electromagnetic MEMS switches generally contain four terminals, wh...
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The invention discloses a switch array based on MEMS (Micro-Electro-Mechanical Systems) switches, which comprises a substrate and a plurality of MEMS switches, wherein one or a plurality of wiring layers are arranged on the substrate along the horizontal direction, a plurality of holes are arranged along the vertical direction and filled with conducting materials, and the holes are respectively connected to different wiring layers; the MEMS switches are distributed on the substrate, a matrix is formed in the horizontal direction and the vertical direction, the input end of each switch in each row of the matrix is respectively in through connection with the holes of the same wiring layer, and the input ends are connected together in the wiring layer; the output end of each switch in each column of the matrix is respectively in through connection with the holes of the same wiring layer, and the output ends are connected together in the wiring layer; and one control end of each switch is respectively in through connection with the holes of the same wiring layer and connected together with a ground wire in the wiring layer. The switch array disclosed by the invention can be firstly combined into the switch array and then integrally packaged, so that the volume of the integrated switch array is greatly reduced, and the applicability is wider.
Description
technical field [0001] The invention relates to a switch array based on MEMS switches, which belongs to the field of micromechanical electronic systems (MEMS). Background technique [0002] The switch can realize two working states of on and off in the circuit or optical circuit. The switch array is mainly a series of switches to achieve functions that cannot be realized by a single switch through a certain combination. Switch arrays are used in a wide range of applications, such as space, communication, radio frequency, portable electronic equipment, automotive electronics and other fields. [0003] The traditional switch array is composed of multiple switches, and its functions can meet most occasions. However, because the switches in the traditional sense are mostly mechanical or solid, and have a large volume, reducing the size of the switch array has always been a problem. In recent years, with the development of micromechanical electronic technology (MEMS), people hav...
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IPC IPC(8): H01H67/24H01H59/00
Inventor 苑京立李慧娟孙建
Owner CHINA AEROSPACE TIMES ELECTRONICS