Treatment device for germane-containing waste gas
A treatment device, germane technology, applied in the direction of gaseous chemical plating, coating, metal material coating process, etc., can solve the problems of plasma disappearance, treatment efficiency can not meet safety and environmental protection regulations and requirements, and achieve good treatment effect of effect
Inactive Publication Date: 2011-06-01
博纯材料股份有限公司
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Problems solved by technology
However, this method often leads to the disappearance of the plasma due to the constant change of the gas pipeline pressure and the presence of the composition of the mixed exhaust gas.
In addition, a treatment efficiency of 95%-99% does not meet the stringent safety and environmental regulations and requirements set by today's government agencies
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[0019] In order to make the above objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction with the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. However, the present invention can be implemented in many ways other than those described here, and those skilled in the art can make similar extensions without departing from the connotation of the present invention. Accordingly, the invention is not limited to the specific implementations disclosed below.
[0020] figure 1 It is a schematic structural diagram of a germane waste gas treatment device according to an embodiment of the present invention. Such as figure 1 As shown, the germane-containing waste gas treatment device 200 of the present invention includes a tower body 208, which can be ...
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The invention discloses a treatment device for germane-containing waste gas. The device comprises a tower body; a filler layer is formed in the tower body; an air inlet passage is formed below the filler layer; the bottom of the tower body is provided with a liquid storage tank, and the top of the tower body is provided with an exhaust fan; the device also comprises a circulating pump for pumping the liquid in the liquid storage tank into the filler layer; and the germane-containing waste gas enters the interior of the filler layer through the air inlet passage under the action of the exhaust fan to react with the liquid in the filler layer, then the germane gas is removed, and the residual gas is discharged out of the tower body by the exhaust fan. The treatment device for the germane-containing waste gas can be directly applied to the treatment of the germane-containing waste gas of solar cell and integrated circuit manufacturing enterprises.
Description
technical field [0001] The invention relates to the technical field of solar cell manufacturing, in particular to a treatment device for waste gas containing germane in the production process of a solar cell manufacturing enterprise. Background technique [0002] The plasma-enhanced chemical vapor deposition (PECVD) process is used to deposit various silicon-based films such as amorphous silicon, microcrystalline silicon and nanocrystalline silicon, which requires a large amount of silane (SiH4) and germane (GeH4), as well as doping Borane used (B 2 h 6 ) and phosphine (PH 3 ) and other gases. Silane can spontaneously ignite in the air, and germane, borane, and phosphine are also toxic gases, so they cannot be discharged directly into the atmosphere for safety and environmental considerations. Especially for germane, generally speaking, the remaining reaction gas containing germane in the deposition equipment must be treated by an exhaust gas scrubber to avoid polluting ...
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Login to View More IPC IPC(8): B01D53/78B01D53/64C23C16/00
Inventor 陈国富施宏伟胡超群
Owner 博纯材料股份有限公司