Method for manufacturing active matrix organic light-emitting diode (AMOLED) apparatus
A light-emitting diode and active matrix technology, which is applied in the field of manufacturing complementary metal oxide semiconductor devices, can solve the problems of increasing the burden of rapid heat treatment and affecting the stability of other devices, and achieve the effects of simplifying the process, reducing the burden and saving costs
Inactive Publication Date: 2011-10-19
AU OPTRONICS CORP
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Among them, when making n-channel metal oxide semiconductor devices (NMOS), the polysilicon implantation is activated and formed. In this process, a mask is used for secondary etching and secondary implantation. Since n-channel metal oxide semiconductor devices (NMOS) requires a higher activation temperature, which will increase the burden of rapid thermal processing (RTP), and will also affect the stability of other devices
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[0021] The specific implementation manners of the present invention will be described in further detail below with reference to the accompanying drawings.
[0022] Figure 1~6 A cross-sectional view of various stages of an active matrix organic light emitting diode device manufactured according to an embodiment of the present invention is shown. In the following description, the patterning process mentioned in the present invention includes processes such as resist coating, masking, exposure, and etching. figure 1 The lower electrode 10 and the first conductive layer 11 are formed in the middle. refer to figure 1 , the first area 1 , the second area 2 , the third area 3 and the fourth area 4 are the NMOS area, the capacitance area, the PMOS area and the bonding pad area, respectively. First, an amorphous silicon material is deposited on a glass substrate, and the amorphous silicon material is crystallized by an excimer structure method (ELA) to form a polycrystalline silic...
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The invention provides a method for manufacturing an active matrix organic light-emitting diode (AMOLED) apparatus, which comprises the steps of: forming a polysilicon substrate and patterning to form a bottom electrode and a first conducting layer; depositing a grid insulating layer and a first metal layer and patterning to form a first grid electrode, a second grid electrode and the bottom electrode through masking; forming light-doped structures on partial regions of the first conducting layer; depositing an isolating layer, and etching to form a first, a second and a third through holes through masking and penetrating through the isolating layer and the grid insulating layer; depositing a second metal layer and patterning to form a source electrode, a drain electrode, a second conducting layer, and a first, a second and a third conductive poles through masking; forming a semiconductor layer for connecting the first source electrode with the drain electrode; depositing a first and a second flat layers, and etching to form a fourth, a fifth and a sixth through holes through masking and penetrating through the first and the second flat layers; depositing the second conducting layer and patterning to form a first, a second and a third electrodes through masking. With the adoption of the method for manufacturing the AMOLED apparatus, the process of n-type doping and secondary etching is omitted, thus the cost can be saved.
Description
technical field [0001] The invention relates to a manufacturing method of an active matrix organic light emitting diode (AMOLED) device, in particular to a manufacturing method of a complementary metal oxide semiconductor device (CMOS) in the active matrix organic light emitting diode (AMOLED) device. Background technique [0002] An active matrix organic light emitting diode (Active Matrix / Organic Light Emitting Diode, abbreviated as AMOLED) device is a new type of flat panel display device. A traditional liquid crystal display (LCD) cannot emit light by itself and needs a backlight source. The active matrix organic light emitting diode (AMOLED) device itself has a light emitting function and is a self-luminous device. Therefore, the active matrix organic light emitting diode (AMOLED) device can be made thinner and lighter than the LCD, and saves more power. In addition, the active matrix organic light-emitting diode (AMOLED) device has the characteristics of faster respon...
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IPC IPC(8): H01L21/77H01L21/84H01L51/56
Inventor 邱大维黄彦士孙铭伟
Owner AU OPTRONICS CORP