Morphology registration analysis-based method for detecting precision of precise main shaft rotation

Abstract

The invention provides a precision spindle rotation accuracy detection method based on shape registration analysis. The surface sample is installed on the precision spindle to be tested, and the control system controls the precision spindle to be tested to a position at an angle θ, and the precision spindle to be tested is sequentially collected. The surface topography map of the surface sample at the complete circumferential position; the topography data registration analysis and processing system analyzes the obtained several surface topography maps and evaluates the error. The present invention measures the topography of the surface sample rotating with the precision spindle and performs subsequent topographic registration analysis and processing. The surface sample does not have high precision requirements, and does not require expensive standard outer circular contours or complicated testing systems and testing processes. The two-dimensional shape / image sensor can measure the radial rotation error of the spindle; if the three-dimensional shape measurement sensor is selected, the radial and axial rotation errors of the spindle can be measured at the same time; the high-resolution measurement sensor can realize nanoscale High-precision spindle rotation error detection.

Description

technical field [0001] The invention relates to a detection method for the rotation error of a precision main shaft. Background technique [0002] Precision rotary spindles are key components of precision machining machine tools and testing equipment. With the development of ultra-precision machining and nanotechnology, people have higher and higher requirements for the accuracy of mechanical parts and measuring instruments, especially high-precision rotary parts, such as ultra-precision machine tool spindles, test turntables, laser gyroscope rotors, circular Standards, laser fusion target devices, etc., the manufacturing tolerance is generally between several nanometers to tens of nanometers, which has reached or exceeded the accuracy level of existing precision roundness instruments (radial rotation error is about 10~50nm) . Improving the rotation accuracy of the spindle to meet the processing requirements of the parts under the limit state and to ensure the accuracy of ...

AI Technical Summary

Problems solved by technology

[0007] The purpose of the present invention is to solve the problem that the traditional precision spindle rotation error measurement method needs expensive standard outer circle profile or complex test system and test process, and then provide a precision spindle rotation accuracy detection method based on shape registration analysis

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