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Petal-basket floating silicon chip automation separation mechanism

An automatic separation and flower basket technology, which is applied in the manufacture of electrical components, conveyor objects, semiconductor/solid-state devices, etc., can solve the problems of low separation speed and high fragmentation rate of silicon wafers, achieve efficient automatic operation, continuous operation, and reduce production costs Effect

Active Publication Date: 2013-06-12
TAIYUAN FENGHUA INFORMATION EQUIP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The invention provides a flower basket type air-floating silicon chip automatic separation mechanism, which solves the problem that the separation process of the silicon chip is mainly completed by hand, the separation speed of the silicon chip is low, and at the same time, the fragmentation rate is caused by the different force of holding the silicon chip by hand. too high problem

Method used

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  • Petal-basket floating silicon chip automation separation mechanism
  • Petal-basket floating silicon chip automation separation mechanism

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Embodiment Construction

[0010] Flower basket type air floating silicon wafer automatic separation mechanism, including PLC and flower basket guide rail 1, flower basket 2 is movable on the flower basket guide rail 1, silicon wafer lifting mechanism 3 is installed under the flower basket 2, and negative pressure suction silicon wafer is arranged above the flower basket 2 Mechanism 5. Air-floating silicon chip automatic separation parts 4 are respectively arranged on both sides of the flower basket 2. The air-floating silicon chip automatic separation part 4 includes a column frame body 6, an inverted T-shaped connecting frame 7, a T-shaped connecting frame 8 and a door-shaped Lying frame 9, the inverted T-shaped connecting frame 7 is vertically arranged on the top of the column frame body 6 along the up-down direction, and a vertical strip hole 10 is provided on the column of the T-shaped connecting frame 8, and the first fixing screw 11 passes through the vertical The elongated hole 10 vertically fixe...

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Abstract

The invention discloses a petal-basket floating silicon chip automation separation mechanism. By using the mechanism, problems of a low separation speed of the silicon chip and a high fragment rate during transmitting the silicon chip can be solved. The mechanism comprises: a PLC, a petal basket guide rail (1) and a petal basket (2). Two sides of the petal basket (2) are respectively provided with floating silicon chip automation separation components (4). The floating silicon chip automation separation component (4) comprises: a column rack (6), an inverted T shaped connection rack (7), a T shaped connection rack (8) and a lying rack which is in a shape of a men character (9). The T shaped connection rack (8) can rise and fall. Two horizontal vertical beam guide rails (13) of the lying rack which is in the shape of the men character (9) are respectively arranged along a horizontal back and forth direction on a crossbeam of the T shaped connection rack (8). Transverse strip holes, which are in a horizontal direction, are arranged on the horizontal vertical beam guide rails (13) so as to realize back and forth movement in the horizontal direction of the lying rack which is in the shape of the men character (9). A rotatable floatation block (16) is flexibly arranged on a crossbeam ventilation shaft (15) of the lying rack which is in the shape of the men character (9) so as to realize high efficient automation work of silicon chip transmission.

Description

technical field [0001] The invention relates to a flower basket type air-floating silicon wafer automatic separation mechanism, in particular to a single separation mechanism for stacked silicon wafers in a flower basket, which is matched with the silicon wafer separation system of a silicon wafer screen printing machine and a silicon wafer testing and sorting machine. Background technique [0002] In the automatic production process of silicon wafers, it is an important process to take out and transfer the silicon wafers stacked together in groups in the flower basket one by one. How to quickly and non-destructively separate the stacked silicon wafers that are electrostatically adsorbed together is the basis for realizing automated and efficient operations . At present, the separation process of silicon wafers is mainly done by hand, and the feeding speed is low. At the same time, the fragmentation rate is too high due to the different force of holding the silicon wafers b...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/00H01L21/677
Inventor 李强郑海红李向东魏海滨赵建军张素枝任剑朱跃红
Owner TAIYUAN FENGHUA INFORMATION EQUIP