SiC crystal growth furnace temperature measuring window

Abstract

The invention discloses a SiC crystal growth furnace temperature measuring window which solves the problem that the traditional SiC crystal growth furnace observation window is easy to be obscured. The SiC crystal growth furnace temperature measuring window comprises a furnace body (1), a flange (3), a temperature measuring window hole, an interlayer connecting pipe (4), an air inlet pipe (5), a circle of small air inlet holes (12), observation window glass (8) and an infrared temperature measuring head (10), wherein the flange (3) is fixedly connected with a pedestal (2) of the furnace body (1); the temperature measuring window hole communicated with the furnace body (1) is arranged in the center of the flange (3); the interlayer connecting pipe (4) is fixedly connected on the temperature measuring window hole; the air inlet pipe (5) is connected with the outer layer pipe wall of the interlayer connecting pipe (4); the small air inlet holes (12) are arranged on the inner layer pipe wall (6) of the interlayer connecting pipe (4) along the inner layer pipe wall at intervals and in parallel to the horizontal level; the observation window glass (8) is fixedly connected with the lower end of the interlayer connecting pipe (4); and the infrared temperature measuring head (10) is arranged below the observation window glass (8) at the lower end of the interlayer connecting pipe (4). The SiC crystal growth furnace temperature measuring window provided by the invention has the advantages of simple structure and low cost.

Description

technical field [0001] The invention relates to a temperature measuring window of a SiC crystal growth furnace. The device is mainly used in SiC crystal growth equipment, and can effectively improve the temperature measurement accuracy of the SiC crystal growth equipment and improve the quality of crystal materials. Background technique [0002] At present, the operating temperature of SiC crystal growth equipment is generally around 2200°C. At such a high temperature, ordinary contact temperature measurement components cannot be used, and only optical temperature measurement can be relied on. Optical temperature measurement is performed by setting a glass observation window on the device and measuring the temperature through the light emitted from the observation window. In the existing SiC crystal growth furnace, because the insulation material used is very easy to generate dust, it is easy to cover the observation window of the crystal growth furnace, which affects the a...

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Problems solved by technology

[0003] The invention provides a temperature measurement window of a SiC crystal growth furnace, which solves the problem that the observation window of the existing SiC crystal growth furnace is easily covered, thereby affecting the accuracy of temperature measurement.

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