High-temperature furnace heating body
A heating element and high temperature furnace technology, applied in crystal growth, single crystal growth, chemical instruments and methods, etc., can solve the problems of high maintenance cost, complicated operation process, inconsistent length of tungsten heating element, etc., to ensure the axial symmetry of the temperature field. performance, low maintenance cost, and simple to make effects
Inactive Publication Date: 2013-04-24
GUANGZHOU JINGLANDI CRYSTAL EQUIP CO LTD
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Problems solved by technology
[0002] At present, the heating element layout adopted by the heating element single crystal production equipment at home and abroad basically adopts the birdcage weaving structure. Although this type of heating element can realize the axial temperature gradient, the length of the tungsten heating element is inconsistent due to the limitation of the structure, and the high temperature end There are hot spots and cold areas in the spatial arrangement, which cannot guarantee the circumferential uniformity of the thermal field at the high temperature end, and the operation process is complicated and the maintenance cost is high
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[0013] Below in conjunction with accompanying drawing and this embodiment the present invention will be further described:
[0014] refer to figure 1 , figure 2 , the present invention first cuts several tungsten into designed lengths, and then processes them into a "bent U-shape". Secondly, the two ends of a group of "bent U-shaped" tungsten rods (1) are distributed on the inside of the two ring electrodes (2) in an axisymmetric arrangement; and then a group of "bent U-shaped" tungsten rods Arranged evenly around the electrode circumference and installed on two ring electrodes (2) respectively, and made into a high-temperature furnace heating element, so as to form a uniform distribution in the meridian direction, with an axial temperature gradient and a completely axially symmetrical temperature effect. After electrification, it forms a Axial temperature gradient and completely symmetrical temperature distribution in the circumferential direction.
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The invention discloses a high-temperature furnace heating body. A plurality of tungsten sticks are processed into a bent U shape, then two ends of the bent U-shaped tungsten sticks are respectively arranged on two annular electrode rings according to an axially-symmetrical arrangement manner to manufacture the high-temperature furnace heating body, and temperature distribution with axial temperature gradient and completely-symmetrical circumferential direction is formed after electrifying. The high-temperature furnace heating body is suitable for high-temperature furnace devices requiring temperature gradient in the longitudinal direction and having axially-symmetrical temperature distribution, such as a single crystal growth furnace. The high-temperature furnace heating body has the advantages of convenience in regulation, simplicity in manufacture, low maintenance cost and the like.
Description
Technical field [0001] The invention relates to single crystal growth equipment by melt seed crystal method, in particular to a high-temperature furnace heating element. Background technique [0002] At present, the heating element layout adopted by the heating element single crystal production equipment at home and abroad basically adopts the birdcage weaving structure. Although this type of heating element can realize the axial temperature gradient, the length of the tungsten heating element is inconsistent due to the limitation of the structure, and the high temperature end There are hot joints and cold areas in the spatial arrangement, which cannot guarantee the circumferential uniformity of the thermal field at the high temperature end, and the operation process is complicated and the maintenance cost is high. Contents of the invention [0003] The purpose of the present invention is to address the above-mentioned shortcomings of the existing heating element single cr...
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IPC IPC(8): C30B15/00
Inventor 刘世全徐家庆
Owner GUANGZHOU JINGLANDI CRYSTAL EQUIP CO LTD