Four-input micromechanical clamped beam thermoelectric microwave power sensor and preparation method thereof

Abstract

The invention relates to a four-input micromechanical clamped beam thermoelectric microwave power sensor. Therefore, restriction that a traditional microwave power sensor can only measure a microwave power in a single input is broken through; measurement on a four-input microwave power can be realized; and meanwhile, it can be detected which is input by the microwave power and what a proportion of the microwave power is. According to the invention, four main line CPWs with a characteristic impedance of 50 ohms are arranged on a gallium arsenide substrate, wherein the four main line CPWs are symmetrically mutually and 90-degree angles are formed between the four main line CPWs. An output terminal of each of the main line CPW is in parallel connection with two terminal matching resistors with an impedance of 100 ohms. A thermocouple is near each of the terminal matching resistor and the four pairs of thermocouples are arranged symmetrically and are in series connection to form a thermopile. MEMS clamped beams are across the main line CPW signal lines and insulated dielectric layers are below the MEMS clamped beams; anchor regions of all the clamped beams are respectively connected with subline CPW signal lines; blocking capacitors are arranged at subline CPW ground wires, wherein the characteristic impedance of each of the subline CPW is 50 ohms; and an output terminal of each of the subline CPW is in parallel connection with two thermocouples with an impedance of 100 ohms.

Description

technical field [0001] The invention provides a four-input micro-mechanical solid-support beam thermoelectric microwave power sensor and a preparation method thereof, belonging to the technical field of micro-electro-mechanical systems (MEMS). Background technique [0002] In the research of microwave technology, microwave power is an important parameter to characterize the characteristics of microwave signals. In the research of microwave signal generation, transmission and reception, microwave power measurement is indispensable, and it has become an important component of electromagnetic measurement. part. In recent years, with the rapid development of MEMS technology, microwave power sensors based on thermocouples are one of the widely used devices. Its working principle is to use the terminal matching resistance to absorb the input microwave power to generate heat, and detect the temperature difference near the matching resistance by placing a thermopile near the termin...

AI Technical Summary

Problems solved by technology

However, the existing microwave power sensors can only measure the microwave power of a single input. When it is necessary to measure the microwave power of multiple inputs, an additional circuit or multiple microwave power sensors are required to realize it, which makes the measurement circuit complicated and highly different from today's Integrated circuit design principles run counter to

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