Optically-assisted ultraprecision machining method

Abstract

The invention belongs to the technical field of optical measurement and machining, and relates to an optically-assisted ultraprecision machining method. A measurement device comprises a flexibility measuring head, an image transferring optical fiber, a coupling mirror, a high-precision turntable and an optical three-dimensional measurement system, wherein the flexibility measuring head is arranged on the high-precision turntable; the center of the flexibility measuring head is positioned on the axis of the rotating shaft of the turntable; and a measured plane image collected by the flexibility measuring head is successively transferred to the optical three-dimensional measurement system by an image transferring optical fiber and the coupling mirror. The invention simultaneously provides an ultraprecision machining method which is realized by the measurement device. According to the measurement device disclosed by the invention, the optical measurement system can be prolonged and shortened, and measurement with big-curvature surface shape and ultraprecision machining compensation can be realized.

Description

technical field [0001] The invention belongs to the technical field of optical measurement and processing, and relates to an optical-assisted ultra-precision processing method. Background technique [0002] Ultra-precision machining of nanometer-scale complex surfaces is the frontier of advanced manufacturing technology and one of the core supporting technologies for the manufacture of key parts of modern high-tech products. The application in the field is more and more extensive, which greatly improves the processing efficiency of key devices, and becomes the embodiment of the comprehensive strength of a country's national economy, national defense and science and technology. At present, various application fields have gradually put forward higher requirements for the machining accuracy of nano-scale complex curved surfaces. Therefore, the manufacture of high-precision nano-scale complex curved surfaces is the main task in the field of ultra-precision machining. In additi...

AI Technical Summary

Problems solved by technology

Existing measurement technologies have the shortcomings of small scanning range, relatively simple measurement surface shape, and offline measurement, which will introduce secondary clamping and positioning errors during processing, and also hinder the integrated automation of processing, measurement, and compensation processes. Therefore, Nano-precision in-situ measurement system based on ultra-precision machine tools has become a research hotspot

The optical measurement method has the advantages of fast speed and non-damage, but due to the complex optical structure, the system structure is not easy to miniaturize, and it is difficult to achieve in-situ placement in the limited space of ultra-precision machine tools, which is also an important reason affecting its in-situ

At the same time, limited by the numerical aperture and field of view of the optical system, this optical non-contact method is not suitable for the measurement of large curvature surfaces

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