Flexible cambered-surface polyvinylidene fluoride piezoelectric sensor and manufacture method
A polyvinylidene fluoride piezoelectric and sensor technology, which is applied in the field of sensors, can solve problems such as increasing the manufacturing process, and achieve the effects of increased sensitivity and increased output
Inactive Publication Date: 2012-06-27
DALIAN UNIV OF TECH
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Problems solved by technology
The method of increasing the buffer layer on the rigid substrate increases the manufacturing process
Method used
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Embodiment 2
[0045] Embodiment 2: the selected curvature radius is 1.25cm, that is, the curvature is 80m -1 The silicon arc polyvinylidene fluoride sensor measures the human pulse, according to Figure 6 Connect the charge amplifier as shown, the output voltage V of the charge amplifier 16 recorded by the oscilloscope out Such as Figure 7 As shown, the waveform is relatively smooth and flat, with moderate amplitude. The main wave and tidal wave of the pulse are clearly distinguished. The amplitude difference and time interval between the main wave and tidal wave are easy to identify, which has a certain reference value in the field of medical research.
[0046] ANSYS simulation and the above examples show that the sensitivity of the polyvinylidene fluoride piezoelectric sensor on the flexible curved surface substrate is higher than that of the flexible planar substrate, and the sensitivity of the polyvinylidene fluoride piezoelectric sensor on the flexible curved surface substrate is Ba...
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The invention relates to a flexible cambered-surface polyvinylidene fluoride piezoelectric sensor and a manufacture method, which belong to the technical field of sensors. The manufacture method is that liquid double-component organic silica gel is made into a flexible silica gel substrate with the cambered surface, a polyvinylidene fluoride piezoelectric film is adhered to the cambered surface of the flexible silica gel substrate, protection layers are covered on the upper surface and the lower surface of the polyvinylidene fluoride piezoelectric film to serve as an upper insulation protection layer and a lower insulation protection layer, and the flexible cambered-surface polyvinylidene fluoride piezoelectric sensor is manufactured. The polyvinylidene fluoride piezoelectric sensor is compact in structure, amplifies stress and strain of the polyvinylidene fluoride piezoelectric film by using the cambered-surface full-flexibility substrate structure, and improves output voltage and sensitivity of the sensor. The sensor can be applied to the fields of pulse measurement, weak vibration, micro force detection and the like.
Description
technical field [0001] The invention belongs to the technical field of sensors, and relates to a flexible arc surface polyvinylidene fluoride piezoelectric sensor and a manufacturing method. Background technique [0002] Polyvinylidene fluoride (abbreviated as PVDF) is a highly crystalline fluoropolymer, which belongs to a kind of tough thermoplastic engineering plastics. The stretched and polarized polyvinylidene fluoride film has a piezoelectric effect, and the piezoelectric voltage constant g of the polyvinylidene fluoride film is almost the highest among all piezoelectric materials; the thickness of the polyvinylidene fluoride piezoelectric film can be from 20μm to 200μm, light and soft, has little effect on the mechanical properties of the structure, and has good compatibility with the structure; it has a wide frequency response range, which can reach 0.1Hz to tens of MHz. Polyvinylidene fluoride piezoelectric film sensors have broad application prospects in the fields...
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IPC IPC(8): H01L41/26H01L41/04H01L41/113H10N30/098H10N30/30H10N30/80
Inventor 董维杰任程诚喻言白凤仙
Owner DALIAN UNIV OF TECH